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期刊
ISSN
0946-7076
刊名
Microsystem technologies
参考译名
微系统技术:传感器,致动器与系统集成
收藏年代
1998~2024
关联期刊
参考译名
收藏年代
Journal of Information Storage and Processing Systems
存储与处理系统信息杂志
2000~2001
全部
1998
1999
2000
2001
2002
2003
2004
2005
2006
2007
2008
2009
2010
2011
2012
2013
2014
2015
2016
2017
2018
2019
2020
2021
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2023
2024
1998, vol.4, no.2
1998, vol.4, no.3
1998, vol.4, no.4
1998, vol.5, no.1
1998, vol.5, no.2
题名
作者
出版年
年卷期
Anti-scattering x-ray grid
C. -M. Tang; E. Stier; K. Fischer; H. Guckel
1998
1998, vol.4, no.4
Characterization of gear pumps fabricated by LIGA
K. Deng; A. S. Dewa; D. C. Ritter; C. Bonham; H. Guckel
1998
1998, vol.4, no.4
Design and fabrication of one millimeter high structures
K. Fischer; J. Klein; B. Chaudhuri; H. Guckel
1998
1998, vol.4, no.4
High winding density micro coils for magnetic actuators
J. Klein; H. Guckel
1998
1998, vol.4, no.4
LIGA-fabricated compact mm-wave linear accelerator cavities
J. J. Song; S. Bajikar; F. Decarlo; Y. W. Kang; R. L. Kustom; D. C. Mancini; A. Nassiri; B. Lai; A. D. Feinerman
1998
1998, vol.4, no.4
Long throw linear magnetic actuators stackable to one millimeter of structural height
K. Fischer; H. Guckel
1998
1998, vol.4, no.4
Manufacturing pinhole arrays for x-ray source diagnostics using LIGA
M. Gerner; K. Holldack; R. Luttge; M. Schmidt
1998
1998, vol.4, no.4
Micro fluidic control systems in deep etch optical lithography
N. Pye; M. McCormick; EG. Chowaneitz; M. Harper; M. Goodwin
1998
1998, vol.4, no.4
Photoresist application for the LIGA process
B. Chaudhuri; H. Guckel; J. Klein; K. Fischer
1998
1998, vol.4, no.4
SLIGA based underwater weapon safety and arming system
L. Fan; H. Last; R. Wood; B. Dudley; C. K. Malek; Z. Ling
1998
1998, vol.4, no.4
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