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期刊
ISSN
0946-7076
刊名
Microsystem technologies
参考译名
微系统技术:传感器,致动器与系统集成
收藏年代
1998~2024
关联期刊
参考译名
收藏年代
Journal of Information Storage and Processing Systems
存储与处理系统信息杂志
2000~2001
全部
1998
1999
2000
2001
2002
2003
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2005
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1998, vol.4, no.2
1998, vol.4, no.3
1998, vol.4, no.4
1998, vol.5, no.1
1998, vol.5, no.2
题名
作者
出版年
年卷期
Actuator - sensor technology on "electronic grade" diamond films
P. Gluche; R. Leuner; A. Vescan; W. Ebert; E. Kohn; C. Rembe; S. aus der Wiesche; E. P. Hofer
1998
1998, vol.5, no.1
Application of the laser flash diffusivity method to thin high thermal conductivity materials
L. Kehoe; P. V. Kelly; G. M. Crean
1998
1998, vol.5, no.1
Fracture and fatigue behavior of single crystal silicon microelements and nanoscopic AFM damage evaluation
K. Komai; K. Minoshima; S. Inoue
1998
1998, vol.5, no.1
Mechanical stress measurements using micro-Raman spectroscopy
I. De Wolf; H. E. Maes
1998
1998, vol.5, no.1
Polymer materials for microsystem technologies
R. Ruprecht; T. Hanemann; V. Piotter; J. Hausselt
1998
1998, vol.5, no.1
Reduction of mechanical stress in micromachined components caused by humidity-induced volume expansion of polymer layers
R. Buchold; A. Nakladal; G. Gerlach; K. Sahre; K. -J. Eichhorn; M. Muller
1998
1998, vol.5, no.1
Torsional tests on microstructures: two methods to determine shear-moduli
G. Schiltges; D. Gsell; J. Dual
1998
1998, vol.5, no.1
Transducer and protective PVD-films for applications in microsystem components
E. Quandt; H. Holleck
1998
1998, vol.5, no.1
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