期刊


ISSN0946-7076
刊名Microsystem technologies
参考译名微系统技术：传感器，致动器与系统集成
收藏年代1998～2024

关联期刊参考译名收藏年代
Journal of Information Storage and Processing Systems存储与处理系统信息杂志2000～2001


全部

1998 1999 2000 2001 2002 2003
2004 2005 2006 2007 2008 2009
2010 2011 2012 2013 2014 2015
2016 2017 2018 2019 2020 2021
2022 2023 2024

1999, vol.5, no.3 1999, vol.5, no.4 1999, vol.6, no.1 1999, vol.6, no.2

题名作者出版年年卷期
Analytical modeling and optimization for a laterally-driven polysilicon thermal actuatorQ. -A. Huang; N. K. S. Lee19991999, vol.5, no.3
Fabrication of nanomechanical optical devices with aligned wafer bondingC. Gui; G. J. Veldhuis; T. M. Koster; P. V. Lambeck; J. W. Berenschot; J. G. E. Gardeniers; M. Elwenspoek19991999, vol.5, no.3
High-speed visualization, a powerful diagnostic tool for microactuators- retrospect and prospectP. Krehl; S. Engemann; C. Rembe; E. P. Hofer19991999, vol.5, no.3
Low-temperature anodic bonding of silicon to silicon wafers by means of intermediate glass layersA. Gerlach; D. Maas; D. Seidel; H. Bartuch; S. Schundau; K. Kaschlik19991999, vol.5, no.3
Materials of LIGA technologyW. Ehrfeld; V. Hessel; H. Lowe; Ch. Schulz; L. Weber19991999, vol.5, no.3



制造业外文文献服务平台