期刊


ISSN1341-8939
刊名電気学会論文誌
参考译名电气学会论文志，E：传感器与微型机器部分
收藏年代1999～2024



全部

1999 2000 2001 2002 2003 2004
2005 2006 2007 2008 2009 2010
2011 2012 2013 2014 2015 2016
2017 2018 2019 2020 2021 2022
2023 2024

2000, vol.120-E, no.1 2000, vol.120-E, no.10 2000, vol.120-E, no.11 2000, vol.120-E, no.12 2000, vol.120-E, no.2 2000, vol.120-E, no.3
2000, vol.120-E, no.4 2000, vol.120-E, no.5 2000, vol.120-E, no.6 2000, vol.120-E, no.7 2000, vol.120-E, no.8-9

题名作者出版年年卷期
3-D micromachining with TIEGA processTakanori Katoh20002000, vol.120-E, no.7
3-dimensional microstructure fabrication using multiple moving mask deep X-ray lithography processOsamu Tabata; Kouichi Terasoma; Norihiro Agawa; Kouji Yamamoto20002000, vol.120-E, no.7
A silicon shadow mask with unlimited patterns and a mechanical alignment structure by Al-delay masking processYoshio Mita; Agnes Tixer; Satoshi Oshima; Makoto Mita; Jean-Philippe Gouy; Hiroyuki Fujita20002000, vol.120-E, no.7
A study of thin film transfer in a novel fabrication method for 3-D microstructures using surface-activated bondingTakayuki Yamada; Mutsuya Takahashi20002000, vol.120-E, no.7
Advanced micro stereolithography with multi UV polymers (system development and application to three-dimensional optical waveguides)Shoji Maruo; Toshihide Ninagawa; Koji Ikuta20002000, vol.120-E, no.7
Development of microconnectors using 3 dimensional micromachining based on deep X-ray lithographyTsuyoshi Haga; Hiroshi Okuyama; Yoshihiro Hirata; Hiroshi Takada20002000, vol.120-E, no.7
Effect of potassium ion on anisotropy of TMAHOsamu Tabata; Manabu Yashima; Tetsuo Yoshioka; Kazuo Sato20002000, vol.120-E, no.7
Fabrication of sub-micron structures with high aspect ratio for practical MEMSHiroshi Ueno; Nobuyoshi Nishi; Susumu Sugiyama20002000, vol.120-E, no.7
Nano protuberance and groove processing of silicon by diamond tip slidingShojiro Miyake; Jong-duk Kim20002000, vol.120-E, no.7
Trapping of microstructure by laser scanning manipulationMiwa Masafumi; Misawa Hiroaki; Kaneko Reizou20002000, vol.120-E, no.7



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