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2001, vol.68, no.5	2001, vol.68, no.6	2001, vol.68, no.7-8	2001, vol.68, no.9

题名	作者	出版年	年卷期
Plasma process technology for micromechanic measuring structures	Arnulf Dehoff; Martin Reetz; Klaus Wandel	2001	2001, vol.68, no.2
A thermal loading device for local parameter determination at microcomponents	Michael Dost; Jurgen Vogel; Ralf Doring	2001	2001, vol.68, no.2
The metrological basis for the inspection of microcomponents by digital holography	W. Osten; S. Seebacher; Th. Baumbach; W. Juptner	2001	2001, vol.68, no.2
A measurement system for the determination of material properties of microcomponents on the basis of digital holography	W. Osten; S. Seebacher; Th. Baumbach; W．Juptner	2001	2001, vol.68, no.2
Measurement of material properties on micro components	Dietmar Vogel; Johann-Peter Sommer; Volker Grosser; Dernd Michel	2001	2001, vol.68, no.2
Components and systems for the 3D-measurement of microstructures	Rolf Fassler; Peter Gussek;	2001	2001, vol.68, no.2
Components for structured illumination and loading control of MEMS	N. Kopp; B. Liedtke; W. Meier	2001	2001, vol.68, no.2