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期刊

ISSN	0947-076X
刊名	Vakuum in Forschung und Praxis
参考译名	真空研究与实践
收藏年代	1998～2024

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2024

2001, vol.13, no.1

2001, vol.13, no.2

2001, vol.13, no.3

2001, vol.13, no.4

2001, vol.13, no.5

2001, vol.13, no.6

题名	作者	出版年	年卷期
Wear resistant modified diamond like carbon coatings with non-sticking properties	A. Hieke	2001	2001, vol.13, no.1
Why evaporation under vacuum?	G. Klinke	2001	2001, vol.13, no.1
Advanced barrier systems for copper metallization in high integrated circuits	C. Wenzel; H. -J. Engelmann	2001	2001, vol.13, no.1
Application of physical analysis techniques for thin film and interface characterization in semicondouctor industry	Ehrenfried Zschech; Eckhard Langer; Hans-Jurgen Engelmann; Kornelia Dittmar; Werner Blum	2001	2001, vol.13, no.1
Transparent and conductive oxide layers	B. Szyszka	2001	2001, vol.13, no.1
Integration of digitally controlled total pressure measurement systems into vakuum equipment	J. Bottcher; F. Pfeifer; A. Schopphoff	2001	2001, vol.13, no.1

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