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期刊

ISSN	0009-031X
刊名	セラミックス
参考译名	陶瓷
收藏年代	1998～2002

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2002

2001, vol.36, no.1	2001, vol.36, no.10	2001, vol.36, no.11	2001, vol.36, no.12	2001, vol.36, no.3	2001, vol.36, no.4
2001, vol.36, no.5	2001, vol.36, no.6	2001, vol.36, no.7	2001, vol.36, no.8	2001, vol.36, no.9

题名	作者	出版年	年卷期
Fundamentals of microfabrication	Eiji Makino; Takayuki Shibata	2001	2001, vol.36, no.3
Processing of silicon with an inductively coupled plasma etcher: a principle and application	Kazuo Kasai; Yoshihiko Imanaka	2001	2001, vol.36, no.3
Ball semiconductor technology and ball micromachining	Risaku Toda	2001	2001, vol.36, no.3
Three-dimensional integrated devices using micromachine technology	Akinobu Satoh	2001	2001, vol.36, no.3
Ceramics micromachining using reactive ion etching	Shuji Tanaka	2001	2001, vol.36, no.3
Preparation of anatase thin films by sol-gel with firing at high temperatures	Nobuo Kieda; Takashi Hayashi	2001	2001, vol.36, no.3

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