期刊


ISSN0912-0289
刊名精密工学会誌
参考译名日本精密工程学会志
收藏年代1998～2025



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1998 1999 2000 2001 2002 2003
2007 2008 2009 2011 2012 2013
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2001, vol.67, no.1 2001, vol.67, no.10 2001, vol.67, no.11 2001, vol.67, no.12 2001, vol.67, no.2 2001, vol.67, no.3
2001, vol.67, no.4 2001, vol.67, no.5 2001, vol.67, no.6 2001, vol.67, no.7 2001, vol.67, no.8 2001, vol.67, no.9

题名作者出版年年卷期
Present and future technologies in the application of charged-particle beamAkio Takaoka20012001, vol.67, no.9
E-beam lithography system for pattern generationNorio Saitou20012001, vol.67, no.9
Development of low energy electron beam proximity projection lithographyNobuo Shimazu20012001, vol.67, no.9
Application of charged particle equipments in LSI photomask manufacturing -current status and prospectsMorihisa Hoga20012001, vol.67, no.9
LSI testing by electron beam probeHiromu Fujioka; Koji Nakamae20012001, vol.67, no.9
Three-dimensional nanostructure fabrication by focused-ion-beam chemical vapor depositionShinji Matsui; Takashi Kaito; Jun-ichi Fujita; Masahiko Ishida; Yukinori Ochiai20012001, vol.67, no.9
Application of electron beams to materials processingAtsushi Iwata20012001, vol.67, no.9
Compact synchrotron radiation ring for industrial X-ray light sourceMasaoki Hirose20012001, vol.67, no.9
Wear estimation of ball end mill and its application to precision machining of curved surfaceJin Kayama; Tsukasa Kondo; Shun'ichi Kaneko; Satoru Igarashi20012001, vol.67, no.9
Prediction of chip formation and cutting forces in drilling with curved cutting edge drills (2nd report) - comparison of calculated and experimental resultsKazuo Kasahara; Akihiko Hirota; Tuyoshi Kawasaki20012001, vol.67, no.9
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