期刊


ISSN0912-0289
刊名精密工学会誌
参考译名日本精密工程学会志
收藏年代1998～2025



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2002, vol.68, no.1 2002, vol.68, no.2 2002, vol.68, no.3 2002, vol.68, no.4 2002, vol.68, no.5 2002, vol.68, no.6
2002, vol.68, no.7 2002, vol.68, no.8

题名作者出版年年卷期
Measurements in nanometer scale - difficulties in the technologyTakeshi Hatsuzawa20022002, vol.68, no.3
Standards and their international comparisons on nanometrologyTomizo Kurosawa20022002, vol.68, no.3
Inspection and measurement of ULSI pattern by electron-beam systemYoshinori Nakayama20022002, vol.68, no.3
Metrological scanning probe microscope systems in national metrology institutesIchiko Misumi; Satoshi Gonda20022002, vol.68, no.3
Measurement of the molecular forcesAkira Yagi20022002, vol.68, no.3
Preparation and characterization of thin filmsToshiyuki Fujimoto; Isao Kojima20022002, vol.68, no.3
Nano-3D coordinate measurement for micro-partsYasuhiro Takaya20022002, vol.68, no.3
Ultrahigh accurate 3-D profilometer using atomic force probe measure nanometerKeiichi Yoshizumi; Keishi Kubo; Hiroyuki Takeuchi; Koji Handa; Takaaki Kassai20022002, vol.68, no.3
Nano-metrology of large surface profiles using angle sensorsWei Gao20022002, vol.68, no.3
Regular crystalline lattice scale-current status and tasksMasato Aketagawa; Koji Takada20022002, vol.68, no.3
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