期刊


ISSN1063-7397
刊名Russian Microelectronics
参考译名俄罗斯微电子学
收藏年代2002～2023



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2002 2003 2004 2005 2006 2007
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2014 2015 2016 2017 2018 2019
2020 2021 2022 2023

2003, vol.32, no.1 2003, vol.32, no.2 2003, vol.32, no.3 2003, vol.32, no.4 2003, vol.32, no.5 2003, vol.32, no.6

题名作者出版年年卷期
Thermally induced viscous flow of borophosphosilicate-glass thin films on stepped surfaces - Part 1: a review of quantitative studies on furnace and rapid thermal annealingV. Y. Vasilev20032003, vol.32, no.3
Selective anodizing for making multilevel interconnectionsA. I. Vorob'eva; V. A. Sokol; V. M. Parkun20032003, vol.32, no.3
Formation and properties of an oxide film on an Si{sub}3N{sub}4 surface under thermal oxidationA. E. Ivanchikov; A. M. Kisel; V. I. Plebanovich; V. I. Pachynin; V. E. Borisenko20032003, vol.32, no.3
Mechanism of the ultradeep anisotropic chemical etching of Si(100) in the microfabrication of piezoresistive pressure sensorsL. V. Sokolov; S. V. Arkhipov; V. M. Shkol'nikov20032003, vol.32, no.3
Al{sub}xGa{sub}(1-x)As/GaAs/Al{sub}xGa{sub}(1-x)As double quantum well with a thin AlAs interwell barrier: structural characterization by SIMS and XRDA. M. Afanas'ev; G. B. Galiev; R. M. Imamov; E. A. Klimov; A. A. Lomov; V. G. Mokerov; V. V. Saraikin; M. A. Chuev20032003, vol.32, no.3
Quantitative optical inspection of mirror-like wafer surfacesS. F. Sen'ko; A. S. Sen'ko; V. A. Zelenin; E. G. Puglachenko20032003, vol.32, no.3
Triple-collector lateral bipolar magnetotransistor: response mechanism and relative sensitivityA. V. Kozlov; M. A. Korolev; S. Yu. Smirov; Yu. A. Chaplygin; R. D. Tikhonov20032003, vol.32, no.3
Fractal analysis of digital systems: the structure and properties of the scale factorP. A. Arutyunov20032003, vol.32, no.3
Delay-conscious switch-level modeling of MOS LSI circuitsL. A. Zolotorevich20032003, vol.32, no.3



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