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期刊
ISSN
0946-7076
刊名
Microsystem technologies
参考译名
微系统技术:传感器,致动器与系统集成
收藏年代
1998~2024
关联期刊
参考译名
收藏年代
Journal of Information Storage and Processing Systems
存储与处理系统信息杂志
2000~2001
全部
1998
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2005
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2005, vol.11, no.1
2005, vol.11, no.11
2005, vol.11, no.12
2005, vol.11, no.2-3
2005, vol.11, no.4-5
2005, vol.11, no.6
2005, vol.11, no.7
2005, vol.11, no.8-10
2005, vol.12, no.1-2
题名
作者
出版年
年卷期
A simple micro-mixer prototyped in polycarbonate
Stephen Wan; Xu Diao; Zheng Hongyu; Ng Teng Yong
2005
2005, vol.11, no.2-3
Casimir effect on the pull-in parameters of nanometer switches
W.-H. Lin; Y.-P. Zhao
2005
2005, vol.11, no.2-3
High temperature resistant antireflective moth-eye structures for infrared radiation sensors
T. Glaser; A. Ihring; W. Morgenroth; N. Seifert; S. Schroter; V. Baier
2005
2005, vol.11, no.2-3
Electrical detection of DNA hybridization with multilayer gold nanoparticles between nanogap electrodes
C.-Y. Tsai; Y.-H. Tsai; C.-C. Pun; B. Chan; T.-Y. Luh; C.-C. Chen; F.-H. Ko; P.-J. Chen; P.-H. Chen
2005
2005, vol.11, no.2-3
Two-dimensional stress measurement of a micromachined piezoresistive structure with micro-Raman spectroscopy
J. Qian; T.-X. Yu; Y.-P. Zhao
2005
2005, vol.11, no.2-3
Tuning the quality factor of bulk micromachined structures using squeezed-film damping
C.-C. Cheng; W. Fang
2005
2005, vol.11, no.2-3
A novel tuning fork gyroscope with high Q-factors working at atmospheric pressure
Y. Chen; J. Jiao; B. Xiong; L. Che; X. Li; Y. Wang
2005
2005, vol.11, no.2-3
A new pre-etching pattern to determine <110> crystallographic orientation on both (100) and (110) silicon wafers
W.-H. Chang; Y.-C. Huang
2005
2005, vol.11, no.2-3
Silicon MEMS components: a fatigue life assessment approach
A. Varvani-Farahani
2005
2005, vol.11, no.2-3
The evaporated metal masks for chemical glass etching for BioMEMS
Y. Mourzina; A. Steffen; A. Offenhausser
2005
2005, vol.11, no.2-3
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