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期刊
ISSN
0946-7076
刊名
Microsystem technologies
参考译名
微系统技术:传感器,致动器与系统集成
收藏年代
1998~2024
关联期刊
参考译名
收藏年代
Journal of Information Storage and Processing Systems
存储与处理系统信息杂志
2000~2001
全部
1998
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2007, vol.13, no.1
2007, vol.13, no.11-12
2007, vol.13, no.2
2007, vol.13, no.3-4
2007, vol.13, no.5-6
2007, vol.13, no.7
2007, vol.13, no.8-10
题名
作者
出版年
年卷期
Theoretical and experimental investigation on electrochemical micromachining
Zhaoyang Zhang; Di Zhu; Ningsong Qu; Minghuan Wang
2007
2007, vol.13, no.7
System-level modeling and simulation for an electrostatic-feedback microaccelerometer based on equivalent electrical representation
Yongquan Wang; Hualing Chen; Xueming He
2007
2007, vol.13, no.7
Squeeze-film effects in MEMS devices with perforated plates for small amplitude vibration
C. Feng; Ya-Pu Zhao; D. Q. Liu
2007
2007, vol.13, no.7
Mathematical analysis and test of an electrostatically actuated micro-power relay
S. J. Jeong; D. E. Lee; W. Wang
2007
2007, vol.13, no.7
Head-disk spacing measurement based on Michelson interferometry using white light illumination
Y. He; H. Zhang; Y. Mitsuya; K. Fukuzawa
2007
2007, vol.13, no.7
A new technology for microfluidic structures preparation based on a photoimageable ceramic
Iwona Wyzkiewicz; Natalia Lewandowska; Michal Chudy; Zbigniew Brzozka; Zbigniew Magonski; Barbara Dziurdzia; Malgorzata Jakubowska; Artur Dybko
2007
2007, vol.13, no.7
Shape optimization and dynamic characterization of multiple-electrostatically deformable microbridges
Yunqiang Li; Packirisamy Muthukumaran; Rama B. Bhat
2007
2007, vol.13, no.7
Investigation of the influence of design parameters on the flow performance of single and double disk viscous micropumps
A. T. Al-Halhouli; M. I. Kilani; A. Al-Salaymeh; S. Buttgenbach
2007
2007, vol.13, no.7
Vibration analysis of axially moving magnetic tape with comparisons to static and dynamic experimental results
Thomas G. Hayes; Bharat Bhushan
2007
2007, vol.13, no.7
3D-feature-based structure design for silicon fabrication of micro devices
Yang Liu; Pingyu Jiang; Dinghong Zhang; Guanghui Zhou
2007
2007, vol.13, no.7
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