期刊


ISSN1341-8939
刊名電気学会論文誌
参考译名电气学会论文志，E：传感器与微型机器部分
收藏年代1999～2024



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2008, vol.128, no.1 2008, vol.128, no.10 2008, vol.128, no.11 2008, vol.128, no.12 2008, vol.128, no.2 2008, vol.128, no.3
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题名作者出版年年卷期
Fabrication of Two-Axis Quartz MEMS-Based Capacitive Tilt SensorJinxing Liang; Takahiro Matsuo; Fusao Kohsaka; Xuefeng Li; Ken Kunitomo; Toshitsugu Ueda20082008, vol.128, no.3
Development of MEMS Capacitive Sensor Using a MOSFET StructureHayato Izumi; Yohei Matsumoto; Seiji Aoyagi; Yusaku Harada; Shoso Shingubara; Minoru Sasaki; Kazuhiro Hane; Hiroshi Tokunaga20082008, vol.128, no.3
Recognition of Bread Key Odorants by Using Polymer Coated QCMsTakashi Nakai; Shinji Kouno; Naoya Hiruma; Masaki Shuzo; Jean-Jacques Delaunay; Ichiro Yamada20082008, vol.128, no.3
Theoretical Analysis of Mechanical-Contact-Based Submicron-Si-Waveguide Optical Microswitch at Telecommunication WavelengthsErdal Bulgan; Yoshiaki Kanamori; Kazuhiro Hane20082008, vol.128, no.3
Debris-Free Laser-Assisted Low-Stress Dicing for Multi-Layered MEMS - Separation Method of Glass LayerYusaku Izawa; Yosuke Tsurumi; Shuji Tanaka; Hideyuki Kikuchi; Keichi Sueda; Yoshiki Nakata; Masayoshi Esashi; Noriaki Miyanaga; Masayuki Fujita20082008, vol.128, no.3
Development of an Electromagnetically Driven Optical MEMS Mirror with Functions of Z-Axis Vibration and X, Y Bi-Directional Tilting, and an Application to Low Coherent Optical InterferometerYoshiyuki Watanabe; Yutaka Abe; Shinnosuke Iwamatsu; Toshiaki Mitsui; Yoshiyuki Takahashi; Toshiyuki Sato20082008, vol.128, no.3
Microfluidic Dispensing Device Using Wettability Gradient and ElectrowettingTakashi Yasuda; Shouhei Harada; Katsuya Daimon20082008, vol.128, no.3



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