期刊


ISSN0960-1317
刊名Journal of Micromechanics and Microengineering
参考译名微型机械与微型工程学报
收藏年代2006～2025



全部

2006 2007 2008 2009 2010 2011
2012 2013 2014 2015 2016 2017
2018 2019 2020 2021 2022 2023
2024 2025

2008, vol.18, no.1 2008, vol.18, no.10 2008, vol.18, no.11 2008, vol.18, no.12 2008, vol.18, no.2 2008, vol.18, no.3
2008, vol.18, no.4 2008, vol.18, no.5 2008, vol.18, no.6 2008, vol.18, no.7 2008, vol.18, no.8 2008, vol.18, no.9

题名作者出版年年卷期
Integration of out-of-plane silicon dioxide microtubes, silicon microprobes and on-chip NMOSFETs by selective vapor-liquid-solid growthKuniharu Takei; Takahiro Kawashima; Takeshi Kawano; Hidekuni Takao; Kazuaki Sawada; Makoto Ishida20082008, vol.18, no.3
A palmtop-sized rotary-drive-type biochemical analysis system by magnetic bead handlingMitsuhiro Shikida; Nobuhiro Nagao; Rentaro Imai; Hiroyuki Honda; Mina Okochi; Hiroshi Ito; Kazuo Sato20082008, vol.18, no.3
Micron and sub-micron feature replication of amorphous polymers at elevated mold temperature without externally applied pressurePeiman Mosaddegh; David C. Angstadt20082008, vol.18, no.3
Development of novel segmented-plate linearly tunable MEMS capacitorsM. Shavezipur; A. Khajepour; S. M. Hashemi20082008, vol.18, no.3
Plasma-enhanced chemical vapor deposition of silicon oxynitride for micromachined millimeter-wave devicesM. Saadaoui; D. Peyrou; H. Achkar; F. Pennec; L. Bouscayrol; B. Rousset; P. T. Boyer; E. Scheid; P. Pons; R. Plana20082008, vol.18, no.3
Mutual coupling of on-chip inductors in CMOS technologyHeng-Ming Hsu; Jeng-Zen Chang20082008, vol.18, no.3
A Latin-cross-shaped integrated resonant cantilever with second torsion-mode resonance for ultra-resoluble bio-mass sensingXiaoyuan Xia; Zhixiang Zhang; Xinxin Li20082008, vol.18, no.3
The fabrication of a micro-spiral structure using EDM deposition in the airGuanxin Chi; Zhenlong Wang; K. Xiao; Jingzhi Cui; Baidong Jin20082008, vol.18, no.3
Sidewall slopes of SU-8 HARMST using deep X-ray lithographyK. D. Vora; B. Y. Shew; E. C. Harvey; J. P. Hayes; A. G. Peele20082008, vol.18, no.3
A low-drift, open-loop controlled, single crystalline silicon micromirror with floating field-limiting shieldsByung-Wook Yoo; Jae-Hyoung Park; Yun-Ho Jang; Yong-Kweon Kim20082008, vol.18, no.3
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