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期刊
ISSN
0946-7076
刊名
Microsystem technologies
参考译名
微系统技术:传感器,致动器与系统集成
收藏年代
1998~2024
关联期刊
参考译名
收藏年代
Journal of Information Storage and Processing Systems
存储与处理系统信息杂志
2000~2001
全部
1998
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2009
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2009, vol.15, no.1
2009, vol.15, no.10/11
2009, vol.15, no.12
2009, vol.15, no.2
2009, vol.15, no.3
2009, vol.15, no.4
2009, vol.15, no.5
2009, vol.15, no.6
2009, vol.15, no.7
2009, vol.15, no.8
2009, vol.15, no.9
题名
作者
出版年
年卷期
Effects of dielectric charging on MEMS-based grating light modulator
J. Zhang; J. Y. Sun; Z. H. Zhang; Y. Zhu
2009
2009, vol.15, no.5
Design and simulation of a normally closed glucose sensitive hydrogel based microvalve
Masoomeh Tehranirokh; Burhanuddin Yeop Majlis; Badariah Bais
2009
2009, vol.15, no.5
Analysis of the nonlinear dynamic stability for an electrically actuated viscoelastic microbeam
Y. M. Fu; J. Zhang; R. G. Bi
2009
2009, vol.15, no.5
High standoff dual-mode-actuation MEMS switches
Y. Choi; M. G. Allen; K. Kim
2009
2009, vol.15, no.5
A hybrid surface tension seal for pneumatic and hydraulic microactuators
M. F. L. De Volder; D. Reynaerts
2009
2009, vol.15, no.5
Fabrication of compliant high aspect ratio silicon microelectrode arrays using micro-wire electrical discharge machining
D. Rakwal; S. Heamawatanachai; E. Bamberg; P. Tathireddy; F. Solzbacher
2009
2009, vol.15, no.5
Analysis of the friction processes in ultrasonic wedge/wedge-bonding
H. Gaul; H. Reichl; M. Schneider-Ramelow
2009
2009, vol.15, no.5
Reliability study of hermetic wafer level MEMS packaging with through-wafer interconnect
S.-H. Choa
2009
2009, vol.15, no.5
Analysis and design of a wide micro beam as a pressure gauge for high sensitivity MEMS fingerprint sensors
M. Damghanian; B. Y. Majlis
2009
2009, vol.15, no.5
Current micropump technologies and their biomedical applications
Farid Amirouche; Yu Zhou; Tom Johnson
2009
2009, vol.15, no.5
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