期刊


ISSN1341-8939
刊名電気学会論文誌
参考译名电气学会论文志，E：传感器与微型机器部分
收藏年代1999～2024



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2009, vol.129, no.1 2009, vol.129, no.10 2009, vol.129, no.11 2009, vol.129, no.12 2009, vol.129, no.4

题名作者出版年年卷期
Inductively Coupled Plasma Reactive Ion Etching of Lead Zirconate Titanate Thin Films for MEMS ApplicationJian Lu; Yi Zhang; Tsuyoshi Ikehara; Toshihiro Itoh; Ryutaro Maeda; Takashi Mihara20092009, vol.129, no.4
Hydrogen Selectivity of a Proton-Pumping Gate FET Hydrogen Sensor in an AC Modulation ModeTomiharu Yamaguchi; Masanori Takisawa; Toshihiko Kiwa; Hironobu Yamada; Keiji Tsukada20092009, vol.129, no.4
Sensing System for Multiple Measurements of Trace Elements Using Laser-Induced Breakdown SpectroscopySatoshi Ikezawa; Muneaki Wakamatsu; Joanna Pawlat; Toshitsugu Ueda20092009, vol.129, no.4
Fabrication of Sub wavelength Gratings on Silicon Micro Lenses for MEMS Scanners at Optical Communication WavelengthsYoshiaki Kanamori; Mao Milira; Kazuhiro Hane20092009, vol.129, no.4



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