期刊


ISSN0960-1317
刊名Journal of Micromechanics and Microengineering
参考译名微型机械与微型工程学报
收藏年代2006～2025



全部

2006 2007 2008 2009 2010 2011
2012 2013 2014 2015 2016 2017
2018 2019 2020 2021 2022 2023
2024 2025

2010, vol.20, no.1 2010, vol.20, no.10 2010, vol.20, no.11 2010, vol.20, no.12 2010, vol.20, no.2 2010, vol.20, no.3
2010, vol.20, no.4 2010, vol.20, no.5 2010, vol.20, no.6 2010, vol.20, no.7 2010, vol.20, no.8 2010, vol.20, no.9

题名作者出版年年卷期
Pneumatic and hydraulic microactuators: a reviewMichael De Voider; Domlniek Reynaerts20102010, vol.20, no.4
RF-MEMS switching devices using vertical comb-drive actuation in the CMOS processY. Naito; K. Nakamura; K. Onisei20102010, vol.20, no.4
Use of nanoporous columnar thin film in the wafer-level packaging of MEMS devicesByung-Kee Lee; Doeg-Hoon Choi; Jun-Bo Yoon20102010, vol.20, no.4
A process for SOI resonators with surface micromachined covers and reduced electrostatic gapsJames R. Dekker; Ari Alastalo; Hannu Kattelus20102010, vol.20, no.4
Formation and manipulation of ferrofluid droplets at a microfluidic T-junctionSay-Hwa Tan; Nam-Trung Nguyen; Levent Yobas; Tae Goo Kang20102010, vol.20, no.4
Plasma-assisted quartz-to-quartz direct bonding for the fabrication of a multilayered quartz template for nanoimprint lithographyJihye Lee; Altun Ali; Ki-don Kim; Jae-Hyun Kim; Dae-guen Choi; Jun-Hyuk Choi; Jun-ho Jeong20102010, vol.20, no.4
Active control of flow and heat transfer in silicon microchannelsGuohua Liu; Jinliang Xu; Yongping Yang; Wei Zhang20102010, vol.20, no.4
Replication performance of Si-N-DLC-coated Si micro-molds in micro-hot-embossingB. Saha; E. Liu; S. B. Tor; N. W. Khun; D. E. Hardt; J. H. Chun20102010, vol.20, no.4
Evaporation characteristics of a hydrophilic surface with micro-scale and/or nano-scale structures fabricated by sandblasting and aluminum anodizationHyungmo Kim; Joonwon Kim20102010, vol.20, no.4
A hemispherical microfluidic channel for the trapping and passive dissipation of microbubblesEdward Kang; Dae Ho Lee; Chang-Beom Kim; Sung Ju Yoo; Sang-Hoon Lee20102010, vol.20, no.4
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