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期刊
ISSN
0946-7076
刊名
Microsystem technologies
参考译名
微系统技术:传感器,致动器与系统集成
收藏年代
1998~2024
关联期刊
参考译名
收藏年代
Journal of Information Storage and Processing Systems
存储与处理系统信息杂志
2000~2001
全部
1998
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2012, vol.18, no.1
2012, vol.18, no.11
2012, vol.18, no.12
2012, vol.18, no.2
2012, vol.18, no.3
2012, vol.18, no.4
2012, vol.18, no.5
2012, vol.18, no.6
2012, vol.18, no.7/8
2012, vol.18, no.9/10
题名
作者
出版年
年卷期
Fabrication of aluminium doped zinc oxide piezoelectric thin film on a silicon substrate for piezoelectric MEMS energy harvesters
Aliza Aini Md Ralib; Anis Nurashikin Nordin; Hanim Salleh; Raihan Othman
2012
2012, vol.18, no.11
An electromechanical model for a clamped-clamped beam type piezoelectric transformer
Chia-Che Wu; Chi-Shao Chen
2012
2012, vol.18, no.11
Dynamic behavior of resonant piezoelectric cantilever as liquid level detection sensor
M. Maroufi; M. Shamshirsaz
2012
2012, vol.18, no.11
Microstructured silicon membrane with soft suspension beams for a high performance MEMS microspeaker
Iman Shahosseini; Elie Lefeuvre; Emile Martincic; Marion Woytasik; Johan Moulin; Souhil Megherbi; Romain Ravaud; Guy Lemarquand
2012
2012, vol.18, no.11
Multiple-output MEMS DC/DC converter: a system modeling study
A. Chaehoi; M. Begbie; D. Weiland; Z. J. Chew; L. Li
2012
2012, vol.18, no.11
Study of black silicon obtained by cryogenic plasma etching: approach to achieve the hot spot of a thermoelectric energy harvester
K. N. Nguyen; D. Abi-Saab; P. Basset; E. Richalot; M. Malak; N. Pavy; F. Flourens; F. Marty; D. Angelescu; Y. Leprince-Wang; T. Bourouina
2012
2012, vol.18, no.11
Fabrication and characterization of a fused silica-based optical waveguide with femtosecond fiber laser pulses
Jaw-Luen Tang; Chien-Hsing Chen; Ting-Chou Chang; Shau-Chun Wang; Lai-Kwan Chau; Wei-Te Wu
2012
2012, vol.18, no.11
Interfacial configurations and mixing performances of fluids in staggered curved-channel micromixers
Jyh Jian Chen; Yi Shiang Shie
2012
2012, vol.18, no.11
Fabrication methods for the manufacture of sapphire microparts
David M. Allen; Roxana Redondo; Maximilien Dany
2012
2012, vol.18, no.11
Study of crescent shaped alignment marks applicable to self-alignment of micro-parts with and without positive and negative poles
Dong F. Wang; Shouhei Shiga; Takao Ishida; Ryutaro Maeda
2012
2012, vol.18, no.11
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