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期刊
ISSN
0946-7076
刊名
Microsystem technologies
参考译名
微系统技术:传感器,致动器与系统集成
收藏年代
1998~2024
关联期刊
参考译名
收藏年代
Journal of Information Storage and Processing Systems
存储与处理系统信息杂志
2000~2001
全部
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2012, vol.18, no.1
2012, vol.18, no.11
2012, vol.18, no.12
2012, vol.18, no.2
2012, vol.18, no.3
2012, vol.18, no.4
2012, vol.18, no.5
2012, vol.18, no.6
2012, vol.18, no.7/8
2012, vol.18, no.9/10
题名
作者
出版年
年卷期
Temperature compensation of micromachined silicon hot wire sensor using ANN technique
M. Laghrouche; B. Idjeri; K. Hammouche; M. Tahanout; J. Boussey; S. Ameur
2012
2012, vol.18, no.3
Mechanical and tribological characterization of a thermally actuated MEMS cantilever
Marius Pustan; Veronique Rochus; Jean-Claude Golinval
2012
2012, vol.18, no.3
Hot embossing at viscous state to enhance filling process for complex polymer structures
Xuelin Zhu; Terrence W. Simon; Tianhong Cui
2012
2012, vol.18, no.3
Flexible balloon actuators for active flow control
Haifeng Lv; Chengyu Jiang; Hui Hou; Zhou Zhou; Jinjun Deng; Binghe Ma; Weizheng Yuan
2012
2012, vol.18, no.3
Determination of residual stress in deep submicron thick films by the critical buckling technique of annular thin plates
Da-Yong Qiao; Xiao-Pei Zheng
2012
2012, vol.18, no.3
Design and characterization of an integrated multifunction micro sensor
Yulong Zhao; Weizhong Wang; Bian Tian; Libo Zhao; Zhuangde Jiang
2012
2012, vol.18, no.3
Design and fabrication of a resonant scanning micromirror suspended by V shaped beams with vertical electrostatic comb drives
Xiao-Ying Li; Qian Jin; Da-Yong Qiao; Bao-Peng Kang; Bin Yan; Yao-Bo Liu
2012
2012, vol.18, no.3
Flip chip solder bump inspection using vibration analysis
Junchao Liu; Tielin Shi; Qi Xia; Guanglan Liao
2012
2012, vol.18, no.3
Disposable microfluidic chip for rapid pathogen identification with DNA microarrays
Johannes R. Peham; Lisa-Maria Recnik; Walter Grienauer; Michael J. Vellekoop; Christa Nohammer; Herbert Wiesinger-Mayr
2012
2012, vol.18, no.3
Determination of residual stresses in a single crystalline 3C-SiC micro-fabricated structure using FE model and measured resonance frequencies
Musaab Hassan
2012
2012, vol.18, no.3
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