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期刊
ISSN
0946-7076
刊名
Microsystem technologies
参考译名
微系统技术:传感器,致动器与系统集成
收藏年代
1998~2024
关联期刊
参考译名
收藏年代
Journal of Information Storage and Processing Systems
存储与处理系统信息杂志
2000~2001
全部
1998
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2013, vol.19, no.1
2013, vol.19, no.11
2013, vol.19, no.12
2013, vol.19, no.2
2013, vol.19, no.3
2013, vol.19, no.4
2013, vol.19, no.5
2013, vol.19, no.6
2013, vol.19, no.7
2013, vol.19, no.8
2013, vol.19, no.9/10
题名
作者
出版年
年卷期
CO_2-assisted thermal fusion bonding of heterogeneous materials by use of surface nano-pillars
Tsung-Fu Yao; Sen-Yeu Yang
2013
2013, vol.19, no.2
Metal-ceramic-composite casting of complex micro components
D. Buqezi-Ahmeti; J. Maisenbacher; J. Gibmeier; T. Hanemann
2013
2013, vol.19, no.2
Improved micro fluxgate sensor with double-layer Fe-based amorphous core
Chong Lei; Jian Lei; Zhen Yang; Yong Zhou
2013
2013, vol.19, no.2
In-plane spectroscopy of microfluidic systems made in photosensitive glass
Khalid Hasan Tantawi; William Gaillard; Jake Helton; Emanuel Waddell; Sergey Mirov; Vladimir Fedorov; John D. Williams
2013
2013, vol.19, no.2
Ultra high aspect ratio penetrating metal microelectrodes for biomedical applications
Abishek B. Kamaraj; Murali M. Sundaram; Ronnie Mathew
2013
2013, vol.19, no.2
A novel high sensitive MEMS intraocular capacitive pressure sensor
Bahram Azizollah Ganji; M. Shahiri-Tabarestani
2013
2013, vol.19, no.2
The monolithic integration system of bulk-Si sensors and actuators based on the Au-Au bonding technology
Chunhua Cai; Ming Qin
2013
2013, vol.19, no.2
Silicon isotropic and anisotropic etching for MEMS applications
S. Negi; R. Bhandari
2013
2013, vol.19, no.2
Micromachined ultrasonic transducers based on lead zirconate titanate (PZT) films
Junhong Li; Chenghao Wang; Jun Ma; Mengwei Liu
2013
2013, vol.19, no.2
Electromagnetically force balanced polymer accelerometer
Ji Li; Werner K. Schomburg
2013
2013, vol.19, no.2
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