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期刊
ISSN
0946-7076
刊名
Microsystem technologies
参考译名
微系统技术:传感器,致动器与系统集成
收藏年代
1998~2024
关联期刊
参考译名
收藏年代
Journal of Information Storage and Processing Systems
存储与处理系统信息杂志
2000~2001
全部
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2013, vol.19, no.1
2013, vol.19, no.11
2013, vol.19, no.12
2013, vol.19, no.2
2013, vol.19, no.3
2013, vol.19, no.4
2013, vol.19, no.5
2013, vol.19, no.6
2013, vol.19, no.7
2013, vol.19, no.8
2013, vol.19, no.9/10
题名
作者
出版年
年卷期
MEMS tri-axial force sensor with an integrated mechanical stopper for guidewire applications
Woo-Tae Park; Rama Krishna Kotlanka; Liang Lou; Muhammad Hamidullah; Chengkuo Lee
2013
2013, vol.19, no.7
A novel approach to realize the local precise variotherm process in micro injection molding
Lei Xie; Thalke Niesel; Monika Leester-Schadel; Gerhard Ziegmann; Stephanus Buttgenbach
2013
2013, vol.19, no.7
Single-step UV diffraction lithography to define a hydrophobic SU-8 interconnected hoodoo structure
Seungha Lee; Gi Seok Jeong; Junghyun Kim; Junghyo Yoon; Sewoon Han; Ji-Yoon Kang; Seok Chung; Sang-Hoon Lee
2013
2013, vol.19, no.7
A high-efficiency three-dimensional helical micromixer in fused silica
Keyin Liu; Qing Yang; Shengguan He; Feng Chen; Yulong Zhao; Xiaole Fan; Lei Li; Chao Shan; Hao Bian
2013
2013, vol.19, no.7
Controllable fabrication and electromechanical characterization of electrophoresis assembled single-walled carbon nanotube-polymer film transducers
Dongzhi Zhang; Tianhong Cui
2013
2013, vol.19, no.7
Suspended bimaterial microchannel resonators for thermal sensing of local heat generation in liquid
Masaya Toda; Tomoyuki Otake; Hidetoshi Miyashita; Yusuke Kawai; Takahito Ono
2013
2013, vol.19, no.7
Raman spectroscopy characterization of a thermal bimorph actuator used in a bio-MEMS device
S. Maggiolino; F. Antoniolli; G. Pezzotti; O. Sbaizero
2013
2013, vol.19, no.7
Fabrication of curved sub-micron Si structures by a combination of anisotropic etching using surfactant-added TMAH solution and FIB direct-drawn mask
Hiroshi Tanaka; Hirotaka Hida; Kazuo Sato
2013
2013, vol.19, no.7
Enhanced electromigration reliability via Ag nanoparticles modified eutectic Sn-58Bi solder joint
Shafiq Ismathullakhan; Hungyin Lau; Yan-cheong Chan
2013
2013, vol.19, no.7
A novel fabrication method based on an after thermal oxidation process for the realization of silicon-beams with normative polygon cross sections shapes
Dingbang Xiao; Xinghua Wang; Zelong Zhou; Xuezhong Wu; Zhihua Chen; Zhanqiang Hou
2013
2013, vol.19, no.7
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