期刊


ISSN0946-7076
刊名Microsystem technologies
参考译名微系统技术:传感器,致动器与系统集成
收藏年代1998~2024

关联期刊参考译名收藏年代
Journal of Information Storage and Processing Systems存储与处理系统信息杂志2000~2001


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1998 1999 2000 2001 2002 2003
2004 2005 2006 2007 2008 2009
2010 2011 2012 2013 2014 2015
2016 2017 2018 2019 2020 2021
2022 2023 2024

2013, vol.19, no.1 2013, vol.19, no.11 2013, vol.19, no.12 2013, vol.19, no.2 2013, vol.19, no.3 2013, vol.19, no.4
2013, vol.19, no.5 2013, vol.19, no.6 2013, vol.19, no.7 2013, vol.19, no.8 2013, vol.19, no.9/10

题名作者出版年年卷期
MEMS tri-axial force sensor with an integrated mechanical stopper for guidewire applicationsWoo-Tae Park; Rama Krishna Kotlanka; Liang Lou; Muhammad Hamidullah; Chengkuo Lee20132013, vol.19, no.7
A novel approach to realize the local precise variotherm process in micro injection moldingLei Xie; Thalke Niesel; Monika Leester-Schadel; Gerhard Ziegmann; Stephanus Buttgenbach20132013, vol.19, no.7
Single-step UV diffraction lithography to define a hydrophobic SU-8 interconnected hoodoo structureSeungha Lee; Gi Seok Jeong; Junghyun Kim; Junghyo Yoon; Sewoon Han; Ji-Yoon Kang; Seok Chung; Sang-Hoon Lee20132013, vol.19, no.7
A high-efficiency three-dimensional helical micromixer in fused silicaKeyin Liu; Qing Yang; Shengguan He; Feng Chen; Yulong Zhao; Xiaole Fan; Lei Li; Chao Shan; Hao Bian20132013, vol.19, no.7
Controllable fabrication and electromechanical characterization of electrophoresis assembled single-walled carbon nanotube-polymer film transducersDongzhi Zhang; Tianhong Cui20132013, vol.19, no.7
Suspended bimaterial microchannel resonators for thermal sensing of local heat generation in liquidMasaya Toda; Tomoyuki Otake; Hidetoshi Miyashita; Yusuke Kawai; Takahito Ono20132013, vol.19, no.7
Raman spectroscopy characterization of a thermal bimorph actuator used in a bio-MEMS deviceS. Maggiolino; F. Antoniolli; G. Pezzotti; O. Sbaizero20132013, vol.19, no.7
Fabrication of curved sub-micron Si structures by a combination of anisotropic etching using surfactant-added TMAH solution and FIB direct-drawn maskHiroshi Tanaka; Hirotaka Hida; Kazuo Sato20132013, vol.19, no.7
Enhanced electromigration reliability via Ag nanoparticles modified eutectic Sn-58Bi solder jointShafiq Ismathullakhan; Hungyin Lau; Yan-cheong Chan20132013, vol.19, no.7
A novel fabrication method based on an after thermal oxidation process for the realization of silicon-beams with normative polygon cross sections shapesDingbang Xiao; Xinghua Wang; Zelong Zhou; Xuezhong Wu; Zhihua Chen; Zhanqiang Hou20132013, vol.19, no.7
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