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期刊
ISSN
0946-7076
刊名
Microsystem technologies
参考译名
微系统技术:传感器,致动器与系统集成
收藏年代
1998~2024
关联期刊
参考译名
收藏年代
Journal of Information Storage and Processing Systems
存储与处理系统信息杂志
2000~2001
全部
1998
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2000
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2005
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2014
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2014, vol.20, no.1
2014, vol.20, no.10/11
2014, vol.20, no.12
2014, vol.20, no.2
2014, vol.20, no.3
2014, vol.20, no.4/5
2014, vol.20, no.6
2014, vol.20, no.7
2014, vol.20, no.8/9
题名
作者
出版年
年卷期
Numerical characterization and experimental verification of an in-plane MEMS-actuator with thin-film aluminum heater
Peter Meszmer; Karla Hiller; Steffen Hartmann; Alexey Shaporin; Daniel May; Raul David Rodriguez; Jorg Arnold; Gianina Schondelmaier; Jan Mehner; Dietrich R. T. Zahn; Bernhard Wunderle
2014
2014, vol.20, no.6
Detection principles and development of microfluidic sensors in the last decade
Rahul Antony; M. S. Giri Nandagopal; Nidhin Sreekumar; N. Selvaraju
2014
2014, vol.20, no.6
Packaging of a 3-axial piezoresistive force sensor with backside contacts
T. Karpati; S. Kulinyi; R. Vegvari; J. Ferencz; A. Nagy; A. E. Pap; G. Battistig
2014
2014, vol.20, no.6
Effect of sputtering power on friction coefficient and surface energy of co-sputtered titanium and molybdenum disulfide coatings and its performance in micro hot-embossing
B. Saha; M. Dirckx; D. E. Hardt; S. B. Tor; E. Liu; J. H. Chun
2014
2014, vol.20, no.6
Investigation on the effect of different design of SCR on the change of resistance in piezoresistive micro cantilever
Khairul Anuar Abd Wahid; Hing Wah Lee; Mohd Aniq Shazni; Ishak Abd Azid
2014
2014, vol.20, no.6
RF MEMS continuous reversible variable inductor based on a microfluidic network
Issam El Gmati; Pierre Francois Calmon; Ali Boukabache; Patrick Pons; Hatem Boussetta; Mouhamed Adel Kallala; Kamel Besbes
2014
2014, vol.20, no.6
Capillary-based water removal cathode for an air-breathing micro direct methanol fuel cell
Xiaohong Wang; Yan'an Zhou; Litian Liu
2014
2014, vol.20, no.6
Formation of metal nanostructures by high-temperature imprinting
Harutaka Mekaru
2014
2014, vol.20, no.6
Design and fabrication of a valveless micropump based on low temperature co-fired ceramic tape technology
Chi-Mo Huang; Yi-Chun Wang
2014
2014, vol.20, no.6
A novel MEMS elastic-based dry electrode for electroencephalography measurement
Tao Yuan; Di Chen; Jingdong Chen; Xiang Chen; Xiaowei Wang; Baoliang Lu
2014
2014, vol.20, no.6
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