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期刊
ISSN
0960-1317
刊名
Journal of Micromechanics and Microengineering
参考译名
微型机械与微型工程学报
收藏年代
2006~2025
全部
2006
2007
2008
2009
2010
2011
2012
2013
2014
2015
2016
2017
2018
2019
2020
2021
2022
2023
2024
2025
2015, vol.25, no.1
2015, vol.25, no.10
2015, vol.25, no.11
2015, vol.25, no.12
2015, vol.25, no.2
2015, vol.25, no.3
2015, vol.25, no.4
2015, vol.25, no.5
2015, vol.25, no.6
2015, vol.25, no.7
2015, vol.25, no.8
2015, vol.25, no.9
题名
作者
出版年
年卷期
A fabrication process for the monolithic integration of magnetoelastic actuators and silicon sensors
Tang, Jun; Green, Scott R.; Gianchandani, Yogesh B.
2015
2015, vol.25, no.4
A novel concept for long-term pre-storage and release of liquids for pressure-driven lab-on-a-chip devices
Czurratis, D.; Beyl, Y.; Zinober, S.; Laermer, F.; Zengerle, R.
2015
2015, vol.25, no.4
Electrostatic comb-drive actuator for MEMS relays/switches with double-tilt comb fingers and tilted parallelogram beams
Gao, Yongfeng; You, Zheng; Zhao, Jiahao
2015
2015, vol.25, no.4
Effect of printing parameters on gravure patterning with conductive silver ink
Kim, Seunghwan; Sung, Hyung Jin
2015
2015, vol.25, no.4
A novel bottom-up copper filling of blind silicon vias in 3D electronic packaging
Du, Li; Shi, Tielin; Su, Lei; Xue, Dongmin; Liao, Guanglan
2015
2015, vol.25, no.4
High-resolution electrohydrodynamic jet printing for the direct fabrication of 3D multilayer terahertz metamaterial of high refractive index
Yudistira, Hadi Teguh; Tenggara, Ayodya Pradhipta; Oh, Sang Soon; VuDat Nguyen; Choi, Muhan; Choi, Choon-Gi; Byun, Doyoung
2015
2015, vol.25, no.4
Formation mechanism of micro-spikes on AISI 4340 steel with femtosecond laser pulses at near-threshold fluence
Kam, Dong-Hyuck; Kim, Jedo; Song, Lijun; Mazumder, Jyoti
2015
2015, vol.25, no.4
Integration of laser die transfer and magnetic self-assembly for ultra-thin chip placement
Kuran, Emine Eda; Berg, Yuval; Tichem, Marcel; Kotler, Zvi
2015
2015, vol.25, no.4
Optimization of innovative approaches to the shortening of filling times in 3D integrated through-silicon vias (TSVs)
Zhang, Yazhou; Ding, Guifu; Wang, Hong; Cheng, Ping; Liu, Rui
2015
2015, vol.25, no.4
Flip-chip integration of Si bare dies on polymeric substrates at low temperature using ICA vias made in dry film photoresist
Quintero, Andres Vasquez; Briand, Danick; de Rooij, Nico F.
2015
2015, vol.25, no.4
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