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期刊
ISSN
0913-5685
刊名
電子情報通信学会技術研究報告
参考译名
电子信息通信学会技术研究报告:可靠性
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2000~2024
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2016, vol.116, no.1
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题名
作者
出版年
年卷期
[依頼講演]強誘電体HfSiOキャパシタにおける形成プロセスと膜物性·電気特性の関係
上牟田雄一; 藤井章輔; 高石理一郎; 井野恒洋; 中崎靖; 齋藤真澄; 小山正人
2016
2016, vol.116, no.118
強誘電体ナノワイヤキャパシタの作製-高集積強誘電体メモリへの応用を目指して
藤沢浩訓; 清水勝; 中嶋誠二
2016
2016, vol.116, no.118
多段積層型トランジスタ構造を用いたFe-FET NAND論理の提案とそのロジックLSIへの適応検討
渡辺重佳; 横田智広
2016
2016, vol.116, no.118
ZrO_2/Al_2O_3/ZrO_2多層を用いたDRAMキャパシタにおけるAl_2O_3層が電気特性に及ぼす効果
女屋崇; 生田目俊秀; 澤田朋実; 栗島一徳; 澤本直美; 大井暁彦; 知京豊裕; 小椋厚志
2016
2016, vol.116, no.118
SiO_2の絶縁破壊と局所陽極酸化を用いた抵抗変化デバイス
角嶋邦之; 若林整; 筒井一生; 岩井洋
2016
2016, vol.116, no.118
Ge基板上エピタキシャルGeSn膜の電気的活性な欠陥の評価
金田裕一; 兼松正行; 坂下満男; 竹内和歌奈; 中塚理; 財満鎭明
2016
2016, vol.116, no.118
XPSによるSiO_2/半導体界面の電位変化およびダイポールの定量
藤村信幸; 大田晃生; 渡辺浩成; 牧原克典; 宮崎誠一
2016
2016, vol.116, no.118
リモート酸素プラズマ支援CVDによる低温SiO_2薄膜形成
グェンスァンチュン; 藤村信幸; 竹内大智; 大田晃生; 牧原克典; 池田弥央; 宮崎誠一
2016
2016, vol.116, no.118
タンタル酸ナノシート/SiO_2/Si界面バンドオフセットにおけるUV照射の効果
速水脩平; 豊田智史; 福田勝利; 菅谷英生; 森田将史; 中田明良; 内本喜晴; 松原英一郎
2016
2016, vol.116, no.118
HfO_2基強誘電体薄膜の作製と特性評価
舟窪浩; 清水荘雄; 片山きりは; 三村和仙
2016
2016, vol.116, no.118
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