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期刊
ISSN
0960-1317
刊名
Journal of Micromechanics and Microengineering
参考译名
微型机械与微型工程学报
收藏年代
2006~2025
全部
2006
2007
2008
2009
2010
2011
2012
2013
2014
2015
2016
2017
2018
2019
2020
2021
2022
2023
2024
2025
2018, vol.28, no.1
2018, vol.28, no.10
2018, vol.28, no.11
2018, vol.28, no.12
2018, vol.28, no.2
2018, vol.28, no.3
2018, vol.28, no.4
2018, vol.28, no.5
2018, vol.28, no.6
2018, vol.28, no.7
2018, vol.28, no.8
2018, vol.28, no.9
题名
作者
出版年
年卷期
Nanomechanical characterization of SU8/ZnO nanocomposite films for applications in energy-harvesting microsystems
Krishna, B.; Chaturvedi, A.; Mishra, N.; Das, K.
2018
2018, vol.28, no.11
Polymer elastic bump formation through photodefinable thermal reflow process for system in foil package
Lee, Chung Woo; Lee, Jae Hak; Song, Jun Yeob; Kim, Seung Man; Kim, Yong Jin; Kim, Chan
2018
2018, vol.28, no.11
A new low-cost fabrication method of SU-8 micro-nano channels and needle tip in electro-hydrodynamic jet chips
Sun, Lei; Liu, Lingpeng; Qi, Liping; Zhou, Jiangang; Yin, Zhifu; Wu, Dongjiang; Zou, Helin
2018
2018, vol.28, no.11
Mass copper micro-embossing by tungsten die for MEMS applications
Li, Xuanyang; Liu, Jian; Xu, Jie; Wang, Zetian; Chen, Jing
2018
2018, vol.28, no.11
A wide-bandwidth tri-axial pendulum accelerometer with fully-differential nano-gap electrodes
Jeong, Y.; Serrano, D. E.; Ayazi, F.
2018
2018, vol.28, no.11
Fabrication and characterization of double curvature bendable silicon wafers
Lips, Bram; Puers, Robert
2018
2018, vol.28, no.11
Simple effective shear modulus approximation for single crysta Si torsional bars
Maimon, R.; Krakover, N.; Tepper-Faran, T.; Gerson, Y.; Krylov, S.
2018
2018, vol.28, no.11
Method for controlling stress gradients in PVD aluminum nitride
Knisely, Katherine E.; Hunt, Bram; Troelsen, Brian; Douglas, Erica; Griffin, Benjamin A.; Stevens, James E.
2018
2018, vol.28, no.11
Tunable optical absorption of dimer nanostructure array achieved by angular evaporation
Kong, Zhe; Zhang, Gufei; Zhang, Jian; Zhang, Xuefeng; Yao, Xiaoli; Shi, Zhen; Li, Chunhui
2018
2018, vol.28, no.11
Realization and AC modeling of electronic circuits with water-gated field effect transistors (WG-FETs) based on gate probe distance
Sonmez, Bedri Gurkan; Ertop, Ozan; Mutlu, Senol
2018
2018, vol.28, no.11
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