期刊


ISSN1341-8939
刊名電気学会論文誌
参考译名电气学会论文志，E：传感器与微型机器部分
收藏年代1999～2024



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2020, vol.140, no.1 2020, vol.140, no.10 2020, vol.140, no.11 2020, vol.140, no.12 2020, vol.140, no.2 2020, vol.140, no.3
2020, vol.140, no.4 2020, vol.140, no.5 2020, vol.140, no.6 2020, vol.140, no.7 2020, vol.140, no.8 2020, vol.140, no.9

题名作者出版年年卷期
Electrostatic Microelectromechanical Logic Devices Made by CMOS-compatible Surface MicromachiningMakoto Mita; Manabu Ataka; Hiroshi Toshiyoshi20202020, vol.140, no.1
Solid-Electrolyte Impedancemetric CO_2 Sensor Attached with La_(0.4)Sr_(0.6)MnO_3 ReceptorShinya Kuramoto; Youichi Shimizu20202020, vol.140, no.1
Design and Fabrication of On-Chip Micro-Thermoelectric Cooler Based on Electrodeposition ProcessJirath Enju; Nguyen Huu Trung; Samat Khairul Fadzli; Po-Hung Chen; Takahito Ono20202020, vol.140, no.1
Etching Mechanism Behind the High-Speed Etching of Silicon in NH_2OH-added Alkaline SolutionsVeerla Swamalatha; Kanneri Thettiyappath Vismaya; Avvaru Venkata Narasimha Rao; Prem Pal; Ashok Kumar Pandey; Hiroshi Tanaka; Kazuo Sato20202020, vol.140, no.1
Area-selective Cu Film Growth on TiN and SiO_2 by Supercritical Fluid DepositionNaoto Usami; Etsuko Ota; Akio Higo; Takeshi Momose; Yoshio Mita20202020, vol.140, no.1



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