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期刊
ISSN
0960-1317
刊名
Journal of Micromechanics and Microengineering
参考译名
微型机械与微型工程学报
收藏年代
2006~2026
全部
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2009
2010
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2025
2026
2025, vol.35, no.1
2025, vol.35, no.10
2025, vol.35, no.11
2025, vol.35, no.12
2025, vol.35, no.2
2025, vol.35, no.3
2025, vol.35, no.4
2025, vol.35, no.5
2025, vol.35, no.6
2025, vol.35, no.7
2025, vol.35, no.8
2025, vol.35, no.9
题名
作者
出版年
年卷期
Diamond ICP-DRIE etching technology with PECVD SiO_2 as mask
Rui Tang; Jinwen Zhang; Jianyu Du; Wei Wang
2025
2025, vol.35, no.11
Selective metallic reinforcement of silver nanowire junctions for improving the electrical conductivity of transparent electrodes
Gun Woo Kim; Seung-A Back; Jong-Eun Park; Srinivasan Arthanari; Hu Seung Lee; June Sik Hwang; Minyang Yang
2025
2025, vol.35, no.11
The lifetime prediction and enhancement of RF MEMS switches
Jiangtao Wei; Zewen Liu
2025
2025, vol.35, no.11
Flow behaviors and transmission characteristics of Knudsen pump with blocked microchannels
Jiang Lan; Pihua Yang; Wenlin Nie; Yao He; Liedong Mi
2025
2025, vol.35, no.11
Internal resonance of a T-shaped electrostatic levitation actuator
Ali Eskandari; Mohammad Alzgool; Yu Tian; Mohammad I Younis; Shahrzad Towfighian
2025
2025, vol.35, no.11
Modeling simulation and experimental study of electromagnetic microvibration energy capture systems
Ting Chen; Jianming Zheng; Yanzi Jiao; Shijie Shan; Zhenyu Wang
2025
2025, vol.35, no.11
Plug-and-play 3D-printed modular microchannel heat sinks for efficient microelectronic chip cooling
Yaser Karimi; Amir Kiyoumarsioskouei; Adel Pourmand; Asal Alimohammadi; Asma Molaie
2025
2025, vol.35, no.11
Development of an original compact multigas detection system based on MEMS components
Florence Ricoul; Jean-Francois Beche; Mahfod Benessalah; Stephane Caplet; Murielle Jurdit; Emilie Lefrancois; Alexandre Teulle; Jean-Baptiste Tissot
2025
2025, vol.35, no.11
Fluorosilane-induced softening and collapse of micropillar arrays
Gabriela Moreira Lana; Maja Fehlberg; Petra Herbeck-Engel; Gisela Heppe; Raimund Schlussler; Torsten Jahnke; Eduard Arzt; Roland Bennewitz
2025
2025, vol.35, no.11
Controllable fabrication of microstructure arrays on electrospun fibers via mold-assisted self-assembly of beaded fibers
Xue Shang; Nianqiang Zhang; Xuanjie Zong; Jilai Wang; Chengpeng Zhang
2025
2025, vol.35, no.11
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