期刊


ISSN0960-1317
刊名Journal of Micromechanics and Microengineering
参考译名微型机械与微型工程学报
收藏年代2006～2026



全部

2006 2007 2008 2009 2010 2011
2012 2013 2014 2015 2016 2017
2018 2019 2020 2021 2022 2023
2024 2025 2026

2026, vol.36, no.1 2026, vol.36, no.2

题名作者出版年年卷期
Ultrafast micro fabrication of silicon neural probes using picosecond laserAiping Wang; Yuan Zhang; Gege Zhan; Zhongxue Gan; Lihua Zhang; Xiaoyang Kang20262026, vol.36, no.1
Integrated microelectrode pore cavity device in silicon (111)Quoc Hung Nguyen; Marc Tornow20262026, vol.36, no.1
Fast direct write laser lithography for large area van der Waals devicesNikhil Joseph Joy; Jayakumar Balakrishnan20262026, vol.36, no.1
Near-zero stiffness MEMS accelerometer utilizing electrothermal buckling in a closed loop configurationYiwei Ge; Yuan Wang; Hussein Hussein; Michael Kraft; Kaichen Song; Zhuoyue Zheng; Chen Wang20262026, vol.36, no.1
Ultra-precision diamond grinding of vapour cells in silicon for quantum technologyP C Gow; G M Churchill; J W Thomas; B Steele; G Quick; R Elvin; L J McKnight; C B E Gawith; J C Gates20262026, vol.36, no.1
Easily detachable glass bonding in microfluidic device based on hydrophilic interactionsWei-Tzu Lin; Chihchen Chen; Kyojiro Morikawa20262026, vol.36, no.1
A finite element model for electrostatic pull-in and snap-through in MEMSChanghao Qu; N Sridhar; Xing Haw Marvin Tan; Hongfei Ye; Yin Liu20262026, vol.36, no.1
Fabrication of photothermally driven micropump using SU-8/Cu compositeTasuku Nakahara; Daiki Maruyama; Kazuyuki Minami20262026, vol.36, no.1
Nested 4-/8- spokes architecture for mode matching in (100) silicon disk resonatorTiantian Wang; Jianlin Chen; Junying Yang; Congchen Wang; Fang Chen; Tao Wu; Yuan Wang; Nan Wang20262026, vol.36, no.1
Design and validation of an instrumented electrospinning system for nanofiber deposition on semiconducting substrates: a case study using SU-8 and CNT/SU-8 compositesDulce K Becerra-Paniagua; Rolando Rubio; Sveidy Vaca; Laura Oropeza-Ramos; Oscar Pilloni20262026, vol.36, no.1
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