期刊


ISSN0385-3004
刊名エバラ時報
参考译名荏原时报
收藏年代1998～2023



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2021 2022 2023

2002, no.194 2002, no.195 2002, no.196

题名作者出版年年卷期
A minimization of environmental impact of a 300 mm CMP deviceTadakazu Sone; Takuji Kobayashi; Kimihide Nagata; Nobuyuki Takada; Takuji Hayama20022002, no.196
Functional water production system - D/R/O systemSuguru Ozawa20022002, no.196
Development of a trap for semi-conductor manufacturing (2nd report) - automatic regeneration trapNorihiko Nomura; Tomonori Ohashi; Yuichi Iwamoto; Isao Yashiro20022002, no.196
Development of a twin-shaft, synchronous motor for dry vacuum pumpsYoshinori Ojima; Takanori Inada; Kozo Matake; Naoki Iijima20022002, no.196
Development of a large capacity turbomolecular pumpMatsutaro Miyamoto; Hiroyuki Kawasaki20022002, no.196
High precision, fine motion stage based on magnetic levitationKatsuhide Watanabe; Ichiju Satoh; Takahide Haga; Shunichi Aiyoshizawa20022002, no.196
Rapid effect disinfection of combined sewer overflows due to run offsKazuhiro Hasegawa; Junichi Inamura; Yutaka Niida; Hideyuki Yoshida; Yuichi Fuchu; Kazuhiro Kasai; Teruo Murakami20022002, no.196
Nanofiltraion water recycling system for softdrink manufacturing plantHitoshi Miyaki; Yasunari Kojima; Susumu Adachi; Kennichi Sasaki20022002, no.196
Research on MAP recovery using a fluidized-bed crystallized phosphorus removal systemKazuaki Shimamura; Yukiko Miura; Yasuhiro Honma; Hideyuki Ishikawa; Toshihiro Tanaka20022002, no.196
Turbomachinery blade optimization by 3-dimentional inverse design methodAkira Goto; Kosuke Ashihara; Hiroyuki Kato; Takaki Sakurai20022002, no.196
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