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期刊
ISSN
0914-4935
刊名
Sensors and materials
参考译名
传感器与材料
收藏年代
1998~2023
全部
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2007, vol.19, no.1
2007, vol.19, no.2
2007, vol.19, no.3
2007, vol.19, no.4
2007, vol.19, no.5
2007, vol.19, no.6
2007, vol.19, no.7
2007, vol.19, no.8
题名
作者
出版年
年卷期
Electrostatically Driven 3-Way Silicon Microvalve for Pneumatic Applications
Stephan Messner; Jochen Schaible; Peter Nommensen; Roland Zengerle
2007
2007, vol.19, no.1
Development of MEMS-Based Piezoelectric Microvalve Technologies
Eui-Hyeok Yang; Choonsup Lee; J. M. Khodadadi
2007
2007, vol.19, no.1
Pneumatic MEMS In-Channel Microvalves with In-Plane Control Ports for Micro Fluidic Systems Integrated on a Chip Surface
Hidekuni Takao; Makoto Ishida
2007
2007, vol.19, no.1
Designing and Fabricating Electromagnetically Actuated Microvalves for MEMS Applications
J. Sutanto; R. Luharuka; P. J. Hesketh; Y. H. Berthelot
2007
2007, vol.19, no.1
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