制造业外文文献服务平台 | foreigndata.cmes.org

期刊

全部

2003, vol.15, no.1	2003, vol.15, no.2	2003, vol.15, no.3	2003, vol.15, no.4	2003, vol.15, no.5	2003, vol.15, no.6
2003, vol.15, no.7	2003, vol.15, no.8

题名	作者	出版年	年卷期
Ultraprecision machining based on physics and chemistry	Yuzo Mori; Kikuji Hirose; Kazuto Yamauchi; Hidekazu Goto; Kazuya Yamamura; Yasuhisa Sano	2003	2003, vol.15, no.1
Nano-mechanical method for seeding circular-shaped etch pits on (100) silicon surface	Mitsuhiro Shikida; Koji Kawasaki; Kazuo Sato; Yasuo Ishihara; Hiroshi Tanaka; Akihito Matsumuro	2003	2003, vol.15, no.1
Evolution of surface roughness in KOH etching of silicon caused by material defects	Eero Haimi; Veikko K. Linkdroos	2003	2003, vol.15, no.1
Effects of ppb-level metal impurities in aqueous potassium hydroxide solution on the etching of Si{110} and {100}	Hiroshi Tanaka; Yoshitsugu Abe; Kazuyuki Inoue; Mitsuhiro Shikida; Kazuo Sato	2003	2003, vol.15, no.1