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2003, vol.15, no.7	2003, vol.15, no.8

题名	作者	出版年	年卷期
Dependence of the anisotropy of wet chemical etching of silicon on the amount of surface coverage by OH radicals	Miguel A. Gosalvez; Adam S. Foster; Risto M. Nieminen	2003	2003, vol.15, no.2
Modelling of anisotropic etching of silicon: anomalies due to facet boundary effects	Ziyad Elalamy; Leslie M. Landsberger; Mojtaba Kahrizi; Anand Pandy; Irina Stateikina; Sebastien Michel	2003	2003, vol.15, no.2
Anisotropic Si etching condition for preparing optically smooth surfaces	Minoru Sasaki; Takehiro Fujii; Kazuhiro Hane	2003	2003, vol.15, no.2
Difference in activated atomic steps on (111) silicon surface during KOH and TMAH etching	Kazuo Sato; Takehiro Masuda; Mitsuhiro Shikida	2003	2003, vol.15, no.2
Effects of mask misalignment and wafer misorientation on silicon V-groove etching	Songsheng Tan; Robert Boudreau; Michael L. Reed	2003	2003, vol.15, no.2