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期刊
ISSN
0734-2101
刊名
Journal of Vacuum Science & Technology
参考译名
真空科学与技术,A辑:真空、表面与膜
收藏年代
2000~2013
全部
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2000, vol.18, no.1
2000, vol.18, no.6
题名
作者
出版年
年卷期
A conductance model (approach) for kinetic studies: the Ti-Ta-Si system
Joshua Pelleg; L. Rubinovich
2000
2000, vol.18, no.6
An anomalous erosion of a rectangular magnetron system
Eiji Shidoji; Masaharu Nemoto; Takuji Nomura
2000
2000, vol.18, no.6
Angular dependence of SiO{sub}2 etching in a fluorocarbon plasma
Byeong-Ok Cho; Sung-Wook Hwang; Gyeo-Re Lee; Sang Heup Moon
2000
2000, vol.18, no.6
Carbon deposition by electron beam cracking of hydrocarbons on Ta{sub}2Zn{sub}3O{sub}8 thin film phosphors
Caroline A. Kondoleon; Phillip Rack; Eric Lambers; Paul Holloway
2000
2000, vol.18, no.6
Change in surface roughness with the thickness of TiO{sub}2 film grown on MgO(001) by Ar-ion beam sputtering
Takeshi Uchitani; Kunisuke Maki
2000
2000, vol.18, no.6
Characterization of step coverage change in ultraviolet-transparent plasma enhanced chemical vapor deposition silicon nitride films
J. Bierner; M. Jacob; H. Schonherr
2000
2000, vol.18, no.6
Codeposition on diamond film surface during reactive ion etching in SF{sub}6 and O{sub}2 plasmas
K. Teii; M. Hori; T. Goto
2000
2000, vol.18, no.6
Control of the radio-frequency wave form at the chuck of an industrial oxide-etch reactor
Lee Berry; Helen Maynard; Paul Miller; Tony Moore; Michael Pendley; Victoria Resta; Dennis Sparks; Qingyun Yang
2000
2000, vol.18, no.6
Dependence of optical properties on structural and compositional parameters in CuGaSe{sub}2
R. Diaz; T. Martin; J. M. Merino; M. Leon; F. Rueda
2000
2000, vol.18, no.6
Depth distribution of Bi{sup}+ and Fe{sup}+ implanted into polyimide (C{sub}22H{sub}10N{sub}2O{sub}5){sub}n
Ke-Ming Wang; Hui Hu; Fei Lu; Feng Chen; Jiang-Hua Zhang; Xiang-Dong Liu; Ji-Tian Liu; Bo Wu; Mu-Bin Huang
2000
2000, vol.18, no.6
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