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期刊
ISSN
0734-2101
刊名
Journal of Vacuum Science & Technology
参考译名
真空科学与技术,A辑:真空、表面与膜
收藏年代
2000~2013
全部
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2007
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2013
2007, vol.25, no.1
2007, vol.25, no.2
2007, vol.25, no.3
2007, vol.25, no.4
2007, vol.25, no.5
2007, vol.25, no.6
题名
作者
出版年
年卷期
Beyond β-C{sub}3N{sub}4-Fullerene-like carbon nitride: A promising coating material
Jorg Neidhardt; Lars Hultman
2007
2007, vol.25, no.4
CO-D{sub}2O coadlayers on Pt(111): Vibrational studies at low coverages
Yuhai Hu; Peter R. Norton; Keith Griffiths
2007
2007, vol.25, no.4
Effects of substrate bias and nitrogen flow ratio on the resistivity and crystal structure of reactively sputtered ZrN{sub}x films at elevated temperature
J. S. Jeng; S. H. Wang; J. S. Chen
2007
2007, vol.25, no.4
Influence of the film properties on the plasma etching dynamics of rf-sputtered indium zinc oxide layers
L. Stafford; W. T. Lim; S. J. Pearton; M. Chicoine; S. Gujrathi; F. Schiettekatte; Jae-Soung Park; Ju-Il Song; Young-Woo Heo; Joon-Hyung Lee; Jeong-Joo Kim; I. I. Kravchenko
2007
2007, vol.25, no.4
Role of energy in Sow-temperature high-rate formation of hydrophilic TiO{sub}2 thin films using pulsed magnetron sputtering
J. Musil; J. Sicha; D. Herman; R. Cerstvy
2007
2007, vol.25, no.4
Influence of electron irradiation and heating on secondary electron yields from non-evaporable getter films observed with in situ X-ray photoelectron spectroscopy
Michiru Nishiwaki; Shigeki Kato
2007
2007, vol.25, no.4
Atomic simulation of SiC etching by energetic SiF{sub}3
F. Gou; Meng Chuanliang; Chen Lingzhouting; Qiu Qian
2007
2007, vol.25, no.4
Thermally regulated valve for minute flows
Hugo Nguyen; Johan Bejhed; Johan Kohier; Greger Thornell
2007
2007, vol.25, no.4
Fabrication of long-range surface plasmon-polariton waveguides in lithium niobate on silicon
Greg Mattiussi; Nancy Lahoud; Robert Charbonneau; Pierre Berini
2007
2007, vol.25, no.4
Characterizations of InN films on Si(111) substrate grown by metal-organic chemical vapor deposition with a predeposited In layer and a two-step growth method
K. J. Chang; J. Y. Chang; M. C. Chen; S. M. Lahn; C. J. Kao; Z. Y. Li; W. Y. Uen; G. C. Chi
2007
2007, vol.25, no.4
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