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期刊
ISSN
0734-2101
刊名
Journal of Vacuum Science & Technology
参考译名
真空科学与技术,A辑:真空、表面与膜
收藏年代
2000~2013
全部
2000
2001
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2003
2004
2005
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2007
2008
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2013
2007, vol.25, no.1
2007, vol.25, no.2
2007, vol.25, no.3
2007, vol.25, no.4
2007, vol.25, no.5
2007, vol.25, no.6
题名
作者
出版年
年卷期
Characterization of Ce-Pd(111) and Ce-Pd(110) surface alloys
H. Tollefsen; L. J. Berstad; S. Raaen
2007
2007, vol.25, no.5
Surface dipole formation and lowering of the work function by Cs adsorption on InP(100) surface
Yun Sun; Zhi Liu; Piero Pianetta
2007
2007, vol.25, no.5
Deposition of TiN and HfO{sub}2 in a commercial 200 mm remote plasma atomic layer deposition reactor
S. B. S. Heil; J. L. van Hemmen; C. J. Hodson; N. Singh; J. H. Klootwijk; F. Roozeboom; M. C. M. van de Sanden; W. M. M. Kessels
2007
2007, vol.25, no.5
Room-temperature ultrahigh vacuum bonding of Ge/GaAs p-n heterojunction wafer using 300 eV hydrogen ion beam surface cleaning
N. Razek; A. Schindler
2007
2007, vol.25, no.5
CrN{sub}x and Cr{sub}(1-x)Al{sub}xN as template films for the growth of α-alumina using ac reactive magnetron sputtering
S. R. Pulugurtha; D. G. Bhat; M. H. Gordon
2007
2007, vol.25, no.5
Molecular dynamics simulations of 30 and 2 keV Ga in Si
Lucille A. Giannuzzi; Barbara J. Garrison
2007
2007, vol.25, no.5
Growth stress buildup in ion beam sputtered Mo thin films and comparative study of stress relaxation upon thermal annealing or ion irradiation
A. Debelle; G. Abadias; A. Michel; C. Jaouen; V. Pelosin
2007
2007, vol.25, no.5
Performance characterization of nonevaporable porous Ti getter films
Chien-Cheng Li; Jow-Lay Huang; Ran-Jin Lin; Ding-Fwu Lii; Chia-Hao Chen
2007
2007, vol.25, no.5
Laterally resolved ion-distribution functions at the substrate position during magnetron sputtering of indium-tin oxide films
A. Plagemann; K. Ellmer; K. Wiesemann
2007
2007, vol.25, no.5
Modeling of magnetically enhanced capacitively coupled plasma sources: Two frequency discharges
Yang Yang; Mark J. Kushner
2007
2007, vol.25, no.5
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