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期刊
ISSN
0734-2101
刊名
Journal of Vacuum Science & Technology
参考译名
真空科学与技术,A辑:真空、表面与膜
收藏年代
2000~2013
全部
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2011, vol.29, no.1
2011, vol.29, no.2
2011, vol.29, no.3
2011, vol.29, no.4
2011, vol.29, no.5
2011, vol.29, no.6
题名
作者
出版年
年卷期
Effect of vacuum ultraviolet and ultraviolet irradiation on mobile charges in the bandgap of low-k-porous organosilicate dielectrics
H. Sinha; M. T. Nichols; A. Sehgal; M. Tomoyasu; N. M. Russell; G. A. Antonelli; Y. Nishi; J. L. Shohet
2011
2011, vol.29, no.1
Critical review: Plasma-surface reactions and the spinning wall method
V. M. Donnelly; J. Guha; L. Stafford
2011
2011, vol.29, no.1
Formation of pyrite (FeS_2) thin films by thermal sulfurization of dc magnetron sputtered iron
R. J. Soukup; P. Prabukanthan; N. J. Ianno; A. Sarkar; C. A. Kamler; D. G. Sekora
2011
2011, vol.29, no.1
Flow of binary gas mixtures through small sampling orifices
Rainer Johnsen; B. K. Chatterjee
2011
2011, vol.29, no.1
Synchrotron photoemission studies on reconstructed strained surfaces
Hidong Kim; Huiting Li; Ganbat Duvjir; Jae M. Seo
2011
2011, vol.29, no.1
Structure and properties of ZrN coatings deposited by high power impulse magnetron sputtering technology
Y. P. Purandare; A. P. Ehiasarian; P. Eh. Hovsepian
2011
2011, vol.29, no.1
Rolling contact fatigue in high vacuum using ion plated nickel-copper-silver solid lubrication
Mike Danyluk; Anoop Dhingra
2011
2011, vol.29, no.1
Spatially resolved measurements of ion density and electron temperature in a dual-frequency capacitively coupled plasma by complete floating double probe technique
Xiang-Zhan Jiang; Yong-Xin Liu; Shuo Yang; Wen-Qi Lu; Zhen-Hua Bi; Xiao-Song Li; You-Nian Wang
2011
2011, vol.29, no.1
Design and fabrication of a novel microgripper with four-point contact fingers
Xiaohu Zheng; Ji-Kwan Kim; Dong-Weon Lee
2011
2011, vol.29, no.1
Correlation of plasma characteristics to etch rate and via sidewall angle in a deep reactive ion etch system using Langmuir probe and optical emission spectroscopy
S. P. Koirala; I. Awaah; S. L. Burkett; M. H. Gordon
2011
2011, vol.29, no.1
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