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期刊
ISSN
1057-7157
刊名
Journal of Microelectromechanical Systems
参考译名
微机电系统杂志
收藏年代
1998~2013
全部
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2001
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2001, vol.10, no.1
2001, vol.10, no.2
2001, vol.10, no.3
2001, vol.10, no.4
题名
作者
出版年
年卷期
Surface micromachined polyimide scanning thermocouple probes
Mo-Huang Li; Julius J. Wu; Yogesh B. Ganchandani
2001
2001, vol.10, no.1
Micromachined electrodes for biopotential measurements
Patrick Griss; Peter Enoksson; Heli K. Tolvanen-Laakso; Pekka Merilainen; Stig ollmar; Goran Stemme
2001
2001, vol.10, no.1
Microstructure to substrate self-assembly using capillary forces
Uthara srinivasan; Dorian Liepmann; Roger T. Howe
2001
2001, vol.10, no.1
Batch transfer of LIGA Microstructures by selective electroplating and bonding
Li-Wei Pan; Liwei Lin
2001
2001, vol.10, no.1
A new organic modifier for anti-stiction
Bong Hwan Kin; Taek Dong Chung; Chang Hoon oh; Kukjin Chun
2001
2001, vol.10, no.1
Dichlorodimethylsilane as an anti-stiction monolayer for MEMS; A comparison to the octadecyltrichlosilane self-assembled monolayer
W. Robert Ashurst; Christina Yau; Carlo Carraro; Roya Maboudian; Michael T. Dugger
2001
2001, vol.10, no.1
Silicon micromachining using in situ DC microplasmas
Chester G. Wilson; Yogesh B. Gianchandani
2001
2001, vol.10, no.1
Siliconn carbide micro-reaction-sintering using micromachined silicon molds
Shuji Tanaka; Shinya Sugimoto; Jing-Feng Li; Ryuzo Watanabe; Masayoshi Esashi
2001
2001, vol.10, no.1
Fabrication of high-aspect-ratio ceramic microstructures by injection molding with the altered lost mold technique
Ren-Haw Chen; Chin-Lung Lan
2001
2001, vol.10, no.1
A robust Co-sputtering fabrication procedure for TiNi shape memory alloys for MEMS
Chen-Luen Shih; Bo-Kuai Lai; Harold Kahn; Stephen M. Phillips; Senior; Arthur H. Heuer
2001
2001, vol.10, no.1
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