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期刊
ISSN
1057-7157
刊名
Journal of Microelectromechanical Systems
参考译名
微机电系统杂志
收藏年代
1998~2013
全部
1998
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1999, vol.8, no.1
1999, vol.8, no.2
1999, vol.8, no.3
1999, vol.8, no.4
题名
作者
出版年
年卷期
Working equations for piezoelectric actuators and sensors
Marc S. Weinberg
1999
1999, vol.8, no.4
The surface/bulk micromachining (SBM) process: a new method for fabricating released MEMS in single crystal silicon
Sangwoo Lee; Sangjun Park; Dong-il (Dan) Cho
1999
1999, vol.8, no.4
Surface tension powered self-assembly of 3-D micro-optomechanical structures
Richard R. A. Syms
1999
1999, vol.8, no.4
Strongly buckled square micromachined membranes
Volker Ziebart; Oliver Paul; Henry Baltes
1999
1999, vol.8, no.4
Phase change in micro channel heat sinks with integrated temperature sensors
Linan Jiang; Man Wong; Yitshak Zohar
1999
1999, vol.8, no.4
Pattern transfer by direct photo etching of poly(vinylidene fluoride) using X rays
Harish M. Manohara; Eizi Morikawa; Jaewu Choi; Phillip T. Sprunger
1999
1999, vol.8, no.4
Optical properties of surface micromachined mirrors with etch holes
Jun Zou; Michal Balberg; Colin Byrne; Chang Liu; David J. Brady
1999
1999, vol.8, no.4
Low-noise MEMS vibration sensor for geophysical applications
Jonathan Bernstein; Raanan Miller; William Kelley; Paul Ward
1999
1999, vol.8, no.4
Integrated polysilicon and DRIE bulk silicon micromachining for an electrostatic torsional actuator
Jer-Liang Andrew Yeh; Hongrui Jiang; Norman C. Tien
1999
1999, vol.8, no.4
Influence of mechanical stress on the offset voltage of hall devices operated with spinning current method
Ralph Steiner; Christoph Maier; Michael Mayer; Sandra Bellekom; Henry Baltes
1999
1999, vol.8, no.4
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