期刊


ISSN1057-7157
刊名Journal of Microelectromechanical Systems
参考译名微机电系统杂志
收藏年代1998～2013



全部

1998 1999 2000 2001 2002 2003
2004 2005 2006 2007 2008 2009
2010 2011 2012 2013

1998, vol.7, no.1 1998, vol.7, no.2

题名作者出版年年卷期
Thin-film shape-memory alloy actuated micropumpsW. L. Benard; H. Kahn; A. H. Heuer; M. A. Huff19981998, vol.7, no.2
Parametric modeling of a microaccelerometer: comparing I- and D-optimal design of experiments for finite-element analysisY. B. Gianchandani; S. B. Crary19981998, vol.7, no.2
On the calibration of multicomponent microforce sensorsWenlin Jin; C. D. Mote19981998, vol.7, no.2
Multistator LIGA-fabricated electrostatic wobble motors with integrated synchronous controlV. D. Samper; A. J. Sangster; R. L. Reuben; U. Wallrabe19981998, vol.7, no.2
MEMS milliactuator for hard-disk-drive tracking servoT. Hirano; Long-Sheng Fan; J. Q. Gao; W. Y. Lee19981998, vol.7, no.2
Independent tuning of linear and nonlinear stiffness coefficientsS. G. Adams; F. M. Bertsch; K. A. Shaw; N. C. MacDonald19981998, vol.7, no.2
High-aspect-ratio Si vertical micromirror arrays for optical switchingW. -H. Juan; S. W. Pang19981998, vol.7, no.2
Fully integrate magnetically actuated micromachined relaysW. P. Taylor; O. Brand; M. G. Allen19981998, vol.7, no.2
Fabrication of three-dimensional microstructures by electrochemically welding structures formed by microcontact printing on planar and curved substratesR. J. Jackman; S. T. Brittain; G. M. Whitesides19981998, vol.7, no.2
Fabrication of thick Si resonators with a frontside-release etch-diffusion processJ. W. Weigold; S. W. Pang19981998, vol.7, no.2
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