期刊


ISSN1057-7157
刊名Journal of Microelectromechanical Systems
参考译名微机电系统杂志
收藏年代1998～2013



全部

1998 1999 2000 2001 2002 2003
2004 2005 2006 2007 2008 2009
2010 2011 2012 2013

2004, vol.13, no.1 2004, vol.13, no.2 2004, vol.13, no.3 2004, vol.13, no.4 2004, vol.13, no.5 2004, vol.13, no.6

题名作者出版年年卷期
Microplastic Lens Array Fabricated by a Hot Intrusion ProcessLi-Wei Pan; Xinjiang Shen; Liwei Lin20042004, vol.13, no.6
VHP Single Crystal Silicon Capacitive Elliptic Bulk-Mode Disk Resonators - Part II: Implementation and CharacterizationSiavash Pourkamali; Zhili Hao; Farrokh Ayazi20042004, vol.13, no.6
VHP Single-Crystal Silicon Elliptic Bulk-Mode Capacitive Disk Resonators - Part I: Design and ModelingZhili Hao; Siavash Pourkamali; Farrokh Ayazi20042004, vol.13, no.6
The SiOG-Based Single-Crystalline Silicon (SCS) RF MEMS Switch With Uniform CharacteristicsJong-Man Kim; Jae-Hyoung Park; Chang-Wook Back; Yong-Kweon Kim20042004, vol.13, no.6
Influence of van der Waals and Casimir Forces on Electrostatic Torsional ActuatorsJian-Gang Guo; Ya-Pu Zhao20042004, vol.13, no.6
Limit Cycle Oscillations in CW Laser-Driven NEMSKeith Aubin; Maxim Zalalutdinov; Tuncay Alan; Robert B. Reichenbach; Richard Rand; Alan Zehnder; Jeevak Parpia; Harold Craighead20042004, vol.13, no.6
Two-Axis Single-Crystal Silicon Micromirror ArraysMehmet R. Dokmeci; Ajay Pareek; Shivalik Bakshi; Marc Waelti; Clifford D. Fung; Khee Hang Heng; Carlos H. Mastrangelo20042004, vol.13, no.6
Analog Piezoelectric-Driven Tunable Gratings With Nanometer ResolutionChee Wei Wong; Yongbae Jeon; George Barbastathis; Sang-Gook Kim20042004, vol.13, no.6
Tilt-Angle Stabilization of Electrostatically Actuated Micromechanical Mirrors Beyond the Pull-In PointJinghong Chen; Wendelin Weingartner; Alexi Azarov; Randy C. Giles20042004, vol.13, no.6
Electrical Contact Resistance as a Diagnostic Tool for MEMS Contact InterfacesAri Lumbantobing; Lior Kogut; Kyriakos Komvopoulos20042004, vol.13, no.6
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