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期刊
ISSN
1057-7157
刊名
Journal of Microelectromechanical Systems
参考译名
微机电系统杂志
收藏年代
1998~2013
全部
1998
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2005
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2010
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2013
2010, vol.19, no.1
2010, vol.19, no.2
2010, vol.19, no.3
2010, vol.19, no.4
2010, vol.19, no.5
2010, vol.19, no.6
题名
作者
出版年
年卷期
Large-Scale Silicone-Rubber-Based Optical Interconnect Packaged With FR4
Dengke Cai; Andreas Neyer
2010
2010, vol.19, no.6
Drug Particle Delivery Investigation Through a Valveless Micropump
Guoguang Su; Ramana M. Pidaparti
2010
2010, vol.19, no.6
A Piezoelectric-Driven Three-Dimensional MEMS VOA Using Attenuation Mechanism With Combination of Rotational and Translational Effects
Kah How Koh; Chengkuo Lee; Takeshi Kobayashi
2010
2010, vol.19, no.6
Bioinspired 3-D Tactile Sensor for Minimally Invasive Surgery
Yating Hu; Rakesh. B. Katragadda; Hongen Tu; Qinglong Zheng; Yuefa Li; Yong Xu
2010
2010, vol.19, no.6
Linear High-Resolution BioMEMS Force Sensors With Large Measurement Range
Jagannathan Rajagopalan; Alireza Tofangchi; M. Taher A. Saif
2010
2010, vol.19, no.6
Parylene-Based Electrochemical-MEMS Transducers
Christian A. Gutierrez; Ellis Meng
2010
2010, vol.19, no.6
Evaluation of Oxygen Plasma and UV Ozone Methods for Cleaning of Occluded Areas in MEMS Devices
D. Adam Hook; James A. Ohlhausen; Jacqueline Krim; Michael T. Dugger
2010
2010, vol.19, no.6
Encapsulation of Capacitive Micromachined Ultrasonic Transducers Using Viscoelastic Polymer
Der-Song Lin; Xuefeng Zhuang; Serena H. Wong; Mario Kupnik; Butrus Thomas Khuri-Yakub
2010
2010, vol.19, no.6
Parylene-Insulated Ultradense Microfabricated Coils
Florian Herrault; Svyatoslav Yorish; Thomas M. Crittenden; Chang-Hyeon Ji; Mark G. Allen
2010
2010, vol.19, no.6
An Ultra Compact Integrated Front End for Wireless Neural Recording Microsystems
Gayatri E. Perlin; Kensall D. Wise
2010
2010, vol.19, no.6
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