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期刊
ISSN
1057-7157
刊名
Journal of Microelectromechanical Systems
参考译名
微机电系统杂志
收藏年代
1998~2013
全部
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2005
2006
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2013
2006, vol.15, no.1
2006, vol.15, no.2
2006, vol.15, no.3
2006, vol.15, no.4
2006, vol.15, no.5
2006, vol.15, no.6
题名
作者
出版年
年卷期
Solid Propellant Microthrusters on Silicon: Design, Modeling, Fabrication, and Testing
Carole Rossi; Benoit Larangot; Phuong-Quyen Pham; Danick Briand; Nicolass F. de Rooij; Manel Puig-Vidal; Josep Samitier
2006
2006, vol.15, no.6
Liquid Polymer Deposition on Free-Standing Microfabricated Parts for Self-Assembly
Christopher J. Morris; Harvey Ho; Babak A. Parviz
2006
2006, vol.15, no.6
Design and Fabrication Issues in Affinity Cantilevers for bioMEMS Applications
Nitin S. Kale; V. Ramgopal Rao
2006
2006, vol.15, no.6
Micromachined Vibratory Diffraction Grating Scanner for Multiwavelength Collinear Laser Scanning
Guangya Zhou; Fook Siong Chau
2006
2006, vol.15, no.6
A CMOS Compatible Ultrasonic Transducer Fabricated With Deep Reactive Ion Etching
Libor Rufer; Christian C. Domingues; Salvador Mir; Valerie Petrini; Jean-Claude Jeannot; Patrick Delobelle
2006
2006, vol.15, no.6
RF-MEMS Tunable Capacitor With 3 V Operation Using Folded Beam Piezoelectric Bimorph Actuator
Takashi Kawakubo; Toshihiko Nagano; Michihiko Nishigaki; Kazuhide Abe; Kazuhiko Itaya
2006
2006, vol.15, no.6
Shape and Material Selection for Optimizing Flexural Vibrations in Multilayered Resonators
Damiano Pasini
2006
2006, vol.15, no.6
Single-Pole Eight-Throw RF MEMS Rotary Switch
Suneat Pranonsatit; Andrew S. Holmes; Ian D. Robertson; Stepan Lucyszyn
2006
2006, vol.15, no.6
Characterization of a Dipole Surface Drive Actuator With Large Travel and Force
Manu Agarwal; David T. Dutton; Jeremy A. Theil; Qing Bai; Evelyn Par; Storrs Hoen
2006
2006, vol.15, no.6
The Effect of Design and Process Parameters on Electromechanical Coupling for a Thin-Film PZT Membrane
Omar Al-Hattamleh; Jeong Cho; Robert F. Richards; David F. Bahr; Cecilia D. Richards
2006
2006, vol.15, no.6
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