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期刊
ISSN
1057-7157
刊名
Journal of Microelectromechanical Systems
参考译名
微机电系统杂志
收藏年代
1998~2013
全部
1998
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2001
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2013
2001, vol.10, no.1
2001, vol.10, no.2
2001, vol.10, no.3
2001, vol.10, no.4
题名
作者
出版年
年卷期
A HARPSS polysilicon vibrating ring gyroscope
Farrokh Ayazi; Khalil Najafi
2001
2001, vol.10, no.2
Surface micromachined piezoelectric accelerometers (PiXLs)
Don L. Devoe; Albert P. Pisano
2001
2001, vol.10, no.2
A novel bulk-micromachined electrostatic microvalve with a curved-compliant structure applicable for a pneumatic tactile display
Levent Yobas; Michael A. Huff; Frederick J. Lisy; Dominique M. Durand
2001
2001, vol.10, no.2
A high-sensitivity polyimide capacitive relative humidity sensor for monitoring anodically bonded hermetic micropackages
Mehmet Dokmeci; Khalil Najafi
2001
2001, vol.10, no.2
Linearization of electrostatically actuated surface micromachined 2-D optical scanner
Hiroshi Toshiyoshi; Wibool Piyawattanametha; Cheng-Ta Chan; Ming C. Wu
2001
2001, vol.10, no.2
A ferrofluidic magnetic micropump
Anson Hatch; Andrew Evan Kamholz; Gary Holman; Paul Yager; Kalr F. Bohringer
2001
2001, vol.10, no.2
A pin fin microheat sink for cooling macroscale conformal surfaces under the influence of thrust and frictional forces
Lyndon S. Stephens; Kevin W. Kelly; Demetris Kountouris; Jeff Mclean
2001
2001, vol.10, no.2
Miniaturization and integration of photoacoustic detection with a microfabricated chemical reactor system
Samara L. Firebaugh; Klavs; F. Jensen; Martin A. Schmidt
2001
2001, vol.10, no.2
Direct integration of micromachined pipettes in a flow channel for single DNA molecule study by optical tweezers
Cristina Rusu; Ronny van't Oever; Meint J. De Boer; Henri V. Jansen; J. W. (Erwin) Berenschot; Martin L. Bennink; Johannes S. Kanger; Bart G., de Grooth; Miko Elwenspoek; Jan Greve; Urgen Brugger; Albert van den Berg
2001
2001, vol.10, no.2
Bent-beam electrothermal actuators-part I: Single beam and cascaded devices
Long Que; Jae-Sung Park; Yogesh B. Gianchandani
2001
2001, vol.10, no.2
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