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期刊
ISSN
1057-7157
刊名
Journal of Microelectromechanical Systems
参考译名
微机电系统杂志
收藏年代
1998~2013
全部
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2001
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2001, vol.10, no.1
2001, vol.10, no.2
2001, vol.10, no.3
2001, vol.10, no.4
题名
作者
出版年
年卷期
Effect of specimen size on young's modulus and fracture strength of polysilicon
William N. Sharpe; Kamili M. Jackson; Kevin J. Hemker; Zielang Xie
2001
2001, vol.10, no.3
Comparison of capacitive and feedback-interferometric measurements on MEMS
Valerio Annovazzi-Lodi; Sabina Merlo; Michele Norgia
2001
2001, vol.10, no.3
Interferometry of actuated microcantilevers to determine material properties and test structure nonidealities in MEMS
Brian D. Jensen; Maarten P. de Boer; Nathan D. Masters; Fernando Bitsie; David A. LaVan
2001
2001, vol.10, no.3
Mechanical property evaluation and failure analysis of cantilevered LIGA nickel microposts
Lyndon S. Stephens; Kevin W. Kelly; Seshu Simhadri; Andy B. McCandless; E. I. Meletis
2001
2001, vol.10, no.3
Thermal conductivity of doped polysilicon layers
Angela D. McConnell; Srinivasan Uma; Kenneth E. Goodson
2001
2001, vol.10, no.3
Design and batch fabrication of probes for Sub-100 nm scanning thermal microscopy
Li Shi; Ohymyoung Kwon; Andrew C. Miner; Arunava Majumdar
2001
2001, vol.10, no.3
An integrated simulator for coupled domain problems in MEMS
Robert M. Kirby; George Em Karniadakis; Oleg Mikulchenko; Kartikeya Mayaram
2001
2001, vol.10, no.3
A hermetic glass-silicon package formed using localized aluminum/silicon-glass bonding
Yu-Ting Cheng; Liwei Lin; Khalil Najafi
2001
2001, vol.10, no.3
Fabrication of Air-channel structures for microfluidic, microelectromechanical, and microelectronic applications
Dhananjay Bhusari; Hollie A. Reed; Michael Wedlake; Agnes M. Padovani; Sue Ann Bidstrup Allen; Paul A. Kohl
2001
2001, vol.10, no.3
Curvature compensation in micromirrors with high-reflectivity optical coatings
Ke Cao; W. Liu; Joseph J. Talghader
2001
2001, vol.10, no.3
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