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期刊
ISSN
0734-2101
刊名
Journal of Vacuum Science & Technology
参考译名
真空科学与技术,A辑:真空、表面与膜
收藏年代
2000~2013
全部
2000
2001
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2003
2004
2005
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2013
2003, vol.21, no.1
2003, vol.21, no.2
2003, vol.21, no.3
2003, vol.21, no.4
2003, vol.21, no.5
2003, vol.21, no.5sup
2003, vol.21, no.6
题名
作者
出版年
年卷期
Effects of titanium content on sol-gel hard optical films prepared in an organic-inorganic hybrid system
Wenxiu Que; X. Hu
2003
2003, vol.21, no.6
Effects of ion beam application on the deposition of low-resistivity titanium nitride films onto silicon
Katsuhiro Yokota; Kazuhiro Nakamura; Tomohiko Kasuya; Katsuhisa Mukai; Masami Ohnishi
2003
2003, vol.21, no.6
Mechanical and tribological properties of sub- and superstoichiometric Ti-C and Ti-Si-C films deposited by magnetron sputtering-pulsed laser deposition
J. E. Krzanowski; J. J. Nainaparampil; A. R. Phani
2003
2003, vol.21, no.6
Etching characteristics and mechanism of Au thin films in inductively coupled Cl{sub}2/Ar plasma
A. M. Efremov; Dong-Pyo Kim; Chang-II Kim
2003
2003, vol.21, no.6
Characterization of B-C-N hybrid prepared by ion implantation
Iwao Shimoyama; Yuji Baba; Sekiguchi Tetsuhiro; Krishana G. Nath
2003
2003, vol.21, no.6
Stable and unstable behavior of inductively coupled electronegative discharges
A. M. Marakhtanov; M. Tuszewski; M. A. Liebermarn; A. J. Lichtenberg; P. Chabert
2003
2003, vol.21, no.6
Fluorinated ethylene propylene copolymer coating for the stability enhancement of electroactive and photoactive systems
Luping Zhao; K. G. Neoh; Yan Zhang; E. T. Kang
2003
2003, vol.21, no.6
Control of pressure rise in a vacuum chamber by boron nitride and copper composite coating
Tetsuo Oishi; Youko Konishi; Masahiro Goto; Akira Kasahara; Masahiro Tosa; Kazuhiro Yoshihara
2003
2003, vol.21, no.6
Fe-doped photocatalytic TiO{sub}2 film prepared by pulsed dc reactive magnetron sputtering
Wenjie Zhang; Ying Li; Shenglong Zhu; Fuhui Wang
2003
2003, vol.21, no.6
Antimony segregation in the oxidation of AlAsSb interlayers
A. M Andrews; K. L. van Horn; T. Mates; J. S. Speck
2003
2003, vol.21, no.6
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