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期刊
ISSN
0734-2101
刊名
Journal of Vacuum Science & Technology
参考译名
真空科学与技术,A辑:真空、表面与膜
收藏年代
2000~2013
全部
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2013
2009, vol.27, no.1
2009, vol.27, no.2
2009, vol.27, no.3
2009, vol.27, no.4
2009, vol.27, no.5
2009, vol.27, no.6
题名
作者
出版年
年卷期
Nonsinusoidal buckling of thin gold films on elastomeric substrates
Huiyang Fei; Hanqing Jiang; Dahl-Young Khang
2009
2009, vol.27, no.3
Innovative technique for tailoring intrinsic stress in reactively sputtered piezoelectric aluminum nitride films
V. V. Felmetsger; P. N. Laptev; S. M. Tanner
2009
2009, vol.27, no.3
Precise and high-speed control of partial pressures of multiple gas species in plasma process chamber using pulse-controlled gas injection
Sadaharu Morishita; Tetsuya Goto; Masaaki Nagase; Tadahiro Ohmi
2009
2009, vol.27, no.3
Deep Modification of materials by thermal stress wave generated by irradiation of high-current pulsed electron beams
Ying Qin; Chuang Dong; Zhenfei Song; Shengzhi Hao; Xianxiu Me; Jingan Li; Xiaogang Wang; Jianxin Zou; Thierry Grosdidier
2009
2009, vol.27, no.3
Transport and structural properties of silicon films in the amorphous-to-microcrystalline transition region
Sumita Mukhopadhyay; Romyani Goswami; Swati Ray
2009
2009, vol.27, no.3
Investigation of interfacial layer development between thin Al{sup}2O{sup}3 films grown using atomic layer deposition and Si(100), Ge(100), or GaAs(100)
L. Lamagna; G. Scarel; M. Fanciulli; G. Pavia
2009
2009, vol.27, no.3
Pitting corrosion protection of stainless steel by sputter deposited hafnia, alumina, and hafnia-alumina nanolaminate films
M. A. Almomani; C. R. Aita
2009
2009, vol.27, no.3
Differential etching behavior between semi-insulating and n-doped 4H-SiC in high-density SF{sub}6/O{sub}2 inductively coupled plasma
Naoya Okamoto
2009
2009, vol.27, no.3
Growth of high-quality SrTiO{sub}3 films using a hybrid molecular beam epitaxy approach
Bharat Jalan; Roman Engel-Herbert; Nicholas J. Wright; Susanne Stemmer
2009
2009, vol.27, no.3
Inductively coupled plasma generator for an environmentally benign perfluorocarbon abatement system
Katsumasa Suzuki; Yoshio Ishihara; Kaoru Sakoda; Yasuyuki Shirai; Akinobu Teramoto; Masaki Hirayama; Tadahiro Ohmi; Takayuki Watanabe; Takashi Ito
2009
2009, vol.27, no.3
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