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期刊
ISSN
0734-2101
刊名
Journal of Vacuum Science & Technology
参考译名
真空科学与技术,A辑:真空、表面与膜
收藏年代
2000~2013
全部
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2013
2009, vol.27, no.1
2009, vol.27, no.2
2009, vol.27, no.3
2009, vol.27, no.4
2009, vol.27, no.5
2009, vol.27, no.6
题名
作者
出版年
年卷期
Analysis of controlled mixed-phase (amorphous+microcrystalline) silicon thin films by real time spectroscopic ellipsometry
N. J. Podraza; Jing Li; C. R. Wronski; E. C. Dickey; R. W. Collins
2009
2009, vol.27, no.6
Characterizations of Ga-doped ZnO films on Si (111) prepared by atmospheric pressure metal-organic chemical vapor deposition
Yen-Chin Huang; Zhen-Yu Li; Li-Wei Weng; Wu-Yih Uen; Shan-Ming Lan; Sen-Mao Liao; Tai-Yuan Lin; Yu-Hsiang Huang; Jian-Wen Chen; Tsun-Neng Yang; Chin-Chen Chiang
2009
2009, vol.27, no.6
Effects of Si capping layers on the properties of ultrathin Co/Ir(111) films
J. S. Tsay; Y. C. Liou; C. M. Chen; W. Y. Chan
2009
2009, vol.27, no.6
Kinetic modeling of the effect of electron beam pulse duration on abatement of carbon tetrafluoride using O_2 as an additive gas
Susumu Kato; Isao Okuda; Eiichi Takahashi; Yuji Matsumoto
2009
2009, vol.27, no.6
Effect of magnetic field strength on deposition rate and energy flux in a dc magnetron sputtering system
Samuel D. Ekpe; Francisco J. Jimenez; David J. Field; Martin J. Davis; Steven K. Dew
2009
2009, vol.27, no.6
Time of flight secondary ion mass spectroscopy studies of poly(allyl methacrylate-g-dimethylsiloxane) copolymers using cryogenic sample handling techniques: Effects of hydration on surface chemical structure and surface chain length distribution
Daniel J. Hook; Lu Chen; Paul L. Valint; Joseph A. Gardella
2009
2009, vol.27, no.6
Mechanisms for plasma etching of HfO_2 gate stacks with Si selectivity and photoresist trimming
Juline Shoeb; Mark J. Kushner
2009
2009, vol.27, no.6
Development of copper-alloy Matsumoto-Ohtsuka-type vacuum flanges and its application to accelerator beam pipes
Y. Suetsugu; M. Shirai; M. Ohtsuka; T. Nishidono; K. Watanabe; Y. Suzuki; M. Tsuchiya; A. Yonemoto; K. Sennyu; H. Hara
2009
2009, vol.27, no.6
Effects of pulsed sputtering frequency on the uniformity of Al:ZnO's transparent conductive oxide properties for solar cell applications
Wonkyun Yang; Junghoon Joo
2009
2009, vol.27, no.6
Zn-doped CuAlS_2 transparent p-type conductive thin films deposited by pulsed plasma deposition
Ming Yang; Yinghua Wang; Guifeng Li; Zhan Shi; Qun Zhang
2009
2009, vol.27, no.6
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