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期刊
ISSN
1057-7157
刊名
Journal of Microelectromechanical Systems
参考译名
微机电系统杂志
收藏年代
1998~2013
全部
1998
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1999, vol.8, no.1
1999, vol.8, no.2
1999, vol.8, no.3
1999, vol.8, no.4
题名
作者
出版年
年卷期
A multilink active catheter with polyimide-based integrated CMOS interface circuits
Ki-Tae Park; Masayoshi Esashi
1999
1999, vol.8, no.4
A new tunneling-based sensor for inertial rotation rate measurements
R. L. Kubena; D. J. Vickers-Kirby; R. J. Joyce; Frederick P. Stratton
1999
1999, vol.8, no.4
A numerical simulation on a pneumatic air table realized by micro-EDM
T. Hirata; O. T. Guenat; T. Akashi; M. -A. Gretillat; N. F. de Rooij
1999
1999, vol.8, no.4
A simulation program for the sensitivity and linearity of piezoresistive pressure sensors
Liwei Lin; Huey-Chi Chu; Yen-Wen Lu
1999
1999, vol.8, no.4
A system for automatic electrical and optical characterization of microelectromechanical devices
Daniel J. Burns; Herbert F. Helbig
1999
1999, vol.8, no.4
An inertial sensor technology using DRIE and wafer bonding with interconnecting capability
Kei Ishihara; Chi-Fan Yung; Arturo A. Ayon; Martin A. Schmidt
1999
1999, vol.8, no.4
CMOS integrated ciliary actuator array as a general-purpose micromanipulation tool for small objects
John W. Suh; R. Bruce Darling; Karl-F. Bohringer; Bruce R. Donald; Henry Baltes; Gregory T. A. Kovacs
1999
1999, vol.8, no.4
Design, fabrication, and testing of micromachined silicon rubber membrane valves
Xing Yang; Charles Grosjean; Yu-Chong Tai
1999
1999, vol.8, no.4
Electrochemically driven polypyrrole bilayers for moving and positioning bulk micromachined silicon plates
Elisabeth Smela; Matthias Kallenbach; Jens Holdenried
1999
1999, vol.8, no.4
Extending the travel range of analog-tuned electrostatic actuators
Elmer S. Hung; Stephen D. Senturia
1999
1999, vol.8, no.4
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