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期刊
ISSN
1057-7157
刊名
Journal of Microelectromechanical Systems
参考译名
微机电系统杂志
收藏年代
1998~2013
全部
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2005
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2007
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2013
2007, vol.16, no.1
2007, vol.16, no.2
2007, vol.16, no.3
2007, vol.16, no.4
2007, vol.16, no.5
2007, vol.16, no.6
题名
作者
出版年
年卷期
Strength Distributions in Polycrystalline Silicon MEMS
Brad L. Boyce; J. Mark Grazier; Thomas E. Buchheit; Michael J. Shaw
2007
2007, vol.16, no.2
Mechanical Characteristics of FIB Deposited Carbon Nanowires Using an Electrostatic Actuated Nano Tensile Testing Device
Mario Kiuchi; Shinji Matsui; Yoshitada Isono
2007
2007, vol.16, no.2
Process Temperature-Dependent Mechanical Properties of Polysilicon Measured Using a Novel Tensile Test Structure
Shoji Kamiya; Jan H. Kuypers; Achim Trautmann; Patrick Ruther; Oliver Paul
2007
2007, vol.16, no.2
Frequency-Dependent Electrical and Thermal Response of Heated Atomic Force Microscope Cantilevers
Keunhan Park; Jungchul Lee; Zhuomin M. Zhang; William P. King
2007
2007, vol.16, no.2
Surface-Micromachined Parylene Dual Valves for On-Chip Unpowered Microflow Regulation
Po-Jui Chen; Damien C. Rodger; Ellis M. Meng; Mark S. Humayun; Yu-Chong Tai
2007
2007, vol.16, no.2
Glass Blowing on a Wafer Level
E. Jesper Eklund; Andrei M. Shkel
2007
2007, vol.16, no.2
Thermoplastic Forming of Bulk Metallic Glass - A Technology for MEMS and Micro structure Fabrication
Jan Schroers; Quoc Pham; Amish Desai
2007
2007, vol.16, no.2
Materials Selection and Design of Microelectrothermal Bimaterial Actuators
Srinivasan Prasanna; S. Mark Spearing
2007
2007, vol.16, no.2
Simple Fabrication Process for Self-Aligned, High-Performance Microscanners - Demonstrated Use to Generate a 2-D Ablation Pattern
Hyuck Choo; David Garmire; James Demmel; Richard S. Muller
2007
2007, vol.16, no.2
A Real Pivot Structure for MEMS Tunable Lasers
X. M. Zhang; A. Q. Liu; C. Lu; D. Y. Tang
2007
2007, vol.16, no.2
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