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期刊
ISSN
0734-2101
刊名
Journal of Vacuum Science & Technology
参考译名
真空科学与技术,A辑:真空、表面与膜
收藏年代
2000~2013
全部
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2003
2004
2005
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2013
2004, vol.22, no.1
2004, vol.22, no.2
2004, vol.22, no.3
2004, vol.22, no.4
2004, vol.22, no.5
2004, vol.22, no.6
题名
作者
出版年
年卷期
Nanoscale fatigue and fracture toughness measurements of multilayered thin film structures for digital micromirror devices
Guohua Wei; Bharat Bhushan; S. Joshua Jacobs
2004
2004, vol.22, no.4
Hydrogen pressure dependence of trench corner rounding during hydrogen annealing
Hiloshi Kuribayashi; Ryosuke Shimizu; Koichi Sudoh; Hiroshi Iwasaki
2004
2004, vol.22, no.4
Development of a continuous generation/supply system of highly concentrated ozone gas for low-temperature oxidation process
Shingo Ichimura; Hidehiko Nonaka; Yoshiki Morikawa; Tsuvoshi Noyori; Tetsuya Nishiguchi; Mitsuru Kekura
2004
2004, vol.22, no.4
Power supply with arc handling for high peak power magnetron sputtering
D. J. Christie; F. Tomasel; W. D. Sproul; D. C. Carter
2004
2004, vol.22, no.4
Measurement of energy flux at the substrate in a magnetron sputter system using an integrated sensor
Samuel D. Ekpe; Steven K. Dew
2004
2004, vol.22, no.4
Exploration of the chemical bonding forms of alkoxy-type organic monolayers directly attached to silicon
Nagahiro Saito; Sun-Hyung Lee; Noriya Maeda; Riichiro Ohta; Hiroyuki Sugimura; Osamu Takai
2004
2004, vol.22, no.4
Photochemical reaction of organosilane self-assembled monolayer as studied by scanning probe microscopy
H. Sugimura; N. Saito; Y. Ishida; I. Ikeda; K. Hayashi; O. Takai
2004
2004, vol.22, no.4
Self-organizing processes in connection with metastable nanocluster states
Michael Rieth; Wolfram Schommers
2004
2004, vol.22, no.4
Simultaneous dynamic stiffness and extension profiles of single titin molecules: Nanomechanical evidence for unfolding intermediates
Jeffrey G. Forbes; Kuan Wang
2004
2004, vol.22, no.4
Microelectromechanical system device for calibration of atomic force microscope cantilever spring constants between 0.01 and 4 N/m
Peter J. Cumpson; John Hedley; Charles A. Clifford; Xinyong Chen; Stephanie Allen
2004
2004, vol.22, no.4
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